LIGA and Its Applications

1. Auflage 2008
ISBN: 978-3-527-31698-4
Verlag: Wiley VCH Verlag GmbH

Buch, Englisch, Band 7, 480 Seiten, Format (B × H): 170 mm x 240 mm, Gewicht: 1060 g

Reihe: Advanced Micro & Nanosystems

Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies.
Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.

Autoren/Hrsg.

Saile, Volker

Wallrabe, Ulrike

Tabata, Osamu

Korvink, Jan G.

Weitere Mitwirkende

Brand, Oliver

Fedder, Gary K.

Hierold, Christofer

Korvink, Jan G.

Tabata, Osamu

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Verbundwerkstoffe
• Naturwissenschaften Physik Quantenphysik
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Produktionstechnik Fertigungstechnik
• Technische Wissenschaften Technik Allgemein Nanotechnologie
• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Biotechnologie

Inhaltsverzeichnis

IntroductionI. TECHNOLOGIESStandard Lithography and Mask TechnologyInnovative Exposure Techniques for 3-D MicrofabricationGalvanics (Electroplating)Moulding (Process and Simulation)Tools for DesignDesign for Assembly and Safe ManufacturingII. APPLICATIONSMarket Analysis and Commercialization of LIGAOptical MEMS and Polymer OpticsX-ray LensesRF ApplicationsEvolution of the SpectrometerMEMS (Actuators)Microfluidics for Biochip ApplicationApplications for Inspection DevicesHarmonic Drive GearsIII. COMMERCIAL EQUIPMENTMachines for Micro Injection MouldingIV. OUTLOOKFilled Resist SystemsTabletop Synchrotron for Future Light Source and its Application for MicrofabricationPTFE Photofabrication by SR (TIEGA Process)

IntroductionI. TechnologiesInnovative exposure techniques for 3-D microfabricationLarge Surface Area TechniquesPTFE photo-fabrication by SR (TIEGA process)Photomask TechnologiesPhotomask ComparisonsGalvanics and Molding Simulating New LIGA ProcessesCommercial Simulation ProgramSimulation Tools for DesignDesign for Assembly and Safe ManufacturingII. ApplicationsMarket Analysis and Commercialization of LIGAOptical MEMS and Polymer OpticsMicromechanicsRF ApplicationsEvolution of the SpectrometerMicrofluidics in BiotechnologyMEMS (actuators)Microfluidics for Biochip ApplicationsUltrasonic TransducersSwiss Luxury Watches Using MEMS ComponentsIII. OutlookExtreme NanostructuringNovel Resist SystemsHard GoldInterferential X-ray LithographyTable-top Synchrotrons for Future Light Sources and their Application in Microfabrication

Über Autor(innen)

Volker Saile is the director of the Institute for Microstructure Technology (IMT) at Karlsruhe Technical University, Germany. ((...))Ulrike Wallrabe is Professor for Microactuators at IMTEK Freiburg, Germany, since 2003. She studied physics at the University of Karlsruhe and went on to obtain her Ph.D. on microturbines and micromotors at the Institute for Microstructure Technology at the Research Centre in Karlsruhe (FZK) in 1992. At IMT, she subsequently dealt with microactuators and their application in medical technology. From 1999 on, she turned to microoptics and developed components for optical metrology, telecommunications and for optical sensors such as fibre connectors, optical switches, distance sensors and spectrometers, generally produced with the LIGA method.Her research interests include exploration of new actuator materials, actuator fabrication techniques, and combining microactuators and microoptics.Osamu Tabata is Professor at the Department of Mechanical Engineering at Kyoto University, Japan. He performed industrial research at Toyota Central Research and Development Laboratories in Aichi from 1981 to 1996. He then joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, and spent Guest Professorships at IMTEK Freiburg, Germany, and at ETH Zurich, Switzerland. In 2003, Japan. He is currently engaged in the research of micro/nano processes, the LIGA process, MEMS and micro/nano system synthetic engineering (SENS). He was honored with the Science News Award in 1987, Presentation Paper Award in 1992, and received the R&D 100 Award in 1993 and 1998.Jan G. Korvink holds a Chair for Microsystem Technology at Albert Ludwig University in Freiburg, Germany, where he runs the laboratory for microsystem simulation. Prior to that, he worked at the Physical Electronics Lab of the ETH Zurich, where he built up and led the microsystem modeling effort. MEMS simulation programs that were developed by him and his group were successfully commercialized. He has co-authored more than 100 papers in scientific journals and conference digests, as well as numerous book chapters and a book on semiconductors for engineers.His research interests cover the modeling and simulation of microsystems and the low-cost fabrication of polymer-based MEMS.