Semiconductor-On-Insulator and Thin Film Transistor Technology: Volume 53

Erscheinungsjahr 1986
ISBN: 978-0-931837-18-0
Verlag: Cambridge University Press

Buch, Englisch, 494 Seiten, Format (B × H): 157 mm x 236 mm, Gewicht: 953 g

Reihe: MRS Proceedings

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book was first published in 2006.

Autoren/Hrsg.

Chiang, A.

Geis, M. W.

Pfeiffer, L.

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde

Inhaltsverzeichnis

Preface; Acknowledgments; Part I. Zone Melting and Recrystallization; Part II. Heteroepitaxy and Porous Silicon; Part III. Buried Oxide and Nitride by Implantation; Part IV. Characterization of SOI Thin Films; Part V. Device and Circuit Applications; Author index; Subject index.