Plasma Processes for Semiconductor Fabrication

Erscheinungsjahr 2014
ISBN: 978-0-521-59175-1
Verlag: Cambridge University Press

Buch, Englisch, Band 8, 232 Seiten, Format (B × H): 183 mm x 260 mm, Gewicht: 639 g

Reihe: Cambridge Studies in Semiconductor Physics and Microelectronic Engineering

Plasma processing is a central technique in the fabrication of semiconductor devices. This self-contained book provides an up-to-date description of plasma etching and deposition in semiconductor fabrication. It presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. The author begins with an overview of plasma reactors, and discusses the various models for understanding plasma processes. He then covers plasma chemistry, and describes in detail the modelling of complex plasma systems, with reference to experimental results. The book closes with a useful glossary of technical terms. No prior knowledge of plasma physics is assumed in the book. It contains many exercises and will serve as an ideal introduction to plasma processing and technology for graduate students of electrical engineering and materials science. It will also be a useful reference for practising engineers in the semiconductor industry.

Autoren/Hrsg.

Hitchon, W. N. G.

Fachgebiete

• Naturwissenschaften Physik Elektromagnetismus Halbleiter- und Supraleiterphysik
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Halb- und Supraleitertechnologie

Inhaltsverzeichnis

1. Introduction; 2. Plasma processes and semiconductors; 3. Plasma electromagnetics and circuit models; 4. Plasma models; 5. Plasma chemistry; 6. Transport at long mean free path; 7. Evolution of the trench; 8. Physical description of the plasma; 9. Going further; 10. Glossary.