Trends and New Applications of Thin Films

Erscheinungsjahr 1998
ISBN: 978-3-03859-847-3
Verlag: Trans Tech Publications

Sonstiges, Englisch, 576 Seiten, Format (B × H): 125 mm x 142 mm, Gewicht: 200 g

Volume is indexed by Thomson Reuters CPCI-S (WoS).
The proceedings of this Symposium cover a broad range of areas concerned with thin film research and applications. Particular emphasis is placed on the properties of thin films and their final application in modern technology.

Autoren/Hrsg.

Hoffmann, Horst

Inhaltsverzeichnis

Diagnostics in Reactive Plasmas with Optical Emission Spectroscopy, Probe Measurement and Energy-Mass SpectrometryCrystallography and Microstructure of Thin Films Studied by X-Ray and Electron DiffractionSurface and Thin Film Analysis with Electron and Mass Spectrometric TechniquesThe Manufacture of Thin Film Transistors and Color Filters for Flat Liquid Crystal DisplaysDoping Diamonds and Diamond Films for Electronic ApplicationsRecent Results on Reactive Magnetron Sputtering for High-Rate Deposition of Ceramic Compound FilmsFabrication of Micro- and NanostructuresModelling of PVC ProcessesReal Time Optical Method of Stress Measurements in Thin FilmsSpectroellipsometric Method for Process Monitoring of Semiconductor Thin Films and InterfacesGiant Magnetoresistive Sensors for Industrial ApplicationsBioactive FilmsIn-Situ Control of Stoichiometry in Room Temperature MBE-Growth of ZrO2 Thin Films Using a Novel Hyperthermal Oxygen Atom SourceSurface Analysis of Hard Coatings Deposited by Modified Pulse Arc ProcessHigh Rate Deposition of Thick Oxide Layers on Plastic SubstratesCathodic Arc Evaporation - A Versatile Tool for Thin Film DepositionThin Film Thermo-Mechanical Sensors Embedded in Metallic StructuresNovel Three Dimensionally Integrated Thin Film Color Detector for Digital Signal ProcessingPiezo-Spectroscopic Stress Measurement near PZT-Microstructures on SiliconPhotoinduced Effects in Thin Amorphous Chalcogenide FilmsOptimized Amorphous Silicon Based Two-Terminal Thin Film Detectors for Color RecognitionMaterial-Selective Planarization of Oxide Layers: A Novel TechnologyDepth Profiling of Thin TiSix-Films on Silicon Carbide by SNMSFlowfill-Process as a New Concept for Inter-Metal-DielectricsCopper Metallization of Submicron Trenches with Pulsed Vacuum ArcHigh Resolution TEM Investigations of Nanostructures in Hard Amorphous Carbon FilmsProperties of Si3N4-Layers Deposited by Medium Frequency Twin Magnetron SputteringOn the Initial Cubic Phase Nucleation in Boron Nitride FilmsStructure, Composition and Residual Stresses of Magnesium Fluoride Thin Films Deposited by Direct EvaporationGradient Interface Layers to Improve c-BN Thin Film AdhesionMicrohardness, Microstructure and Composition Behavior of Stainless Steel 304 Laser Surface Alloyed with SiliconTitanium Nitride - Silicon Nitride Composite Coatings Deposited by Reactive Magnetron SputteringInfrared Analysis of Boron Nitride Thin FilmsTransferred Layers Properties in Dry Sliding Contact of Copper/Carbon-Carbon Composite CoupleEvaluation of Stiffness, Hardness and Adhesion of Thin FilmsResidual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel SubstratesFiltering Shields in Vacuum-Arc Plasma SourcesVacuum-Arc Systems for Depositing 'Drop-Free' Coatings onto Inner SurfacesCoating Deposition by Condensing the Particle Flux from the Target Sputtered in the Low-Pressure Arc PlasmaTreatment of Materials in Radial Low-Pressure Arc Plasma StreamsStudy of a Pulsed DC Glow-Discharge Used for Plasma-CVD with an Ultrafast Videosystem and a Langmuir-ProbeIon Sputtering of Metals in a System with a Thermionic Inert Gas Plasma SourceIon Nitriding of Steels in a System with a Thermionic Gas Plasma SourceOptical Emission Spectroscopy in High Target Powder Density Magnetron SourceBias Enhanced Nucleation and Growth of Diamond Films on Titanium SubstratesAn UHV-Compatible DC Off-Axis Sputtering Device for Reactive Sputtering and Investigation of the Plasma Properties during Niobium DepositionVacuum-Arc Evaporator of Metals with an Extended Planar CathodeSeveral Ways to Modify Structural and Morphological Properties of Thin Films Prepared by Reactive SputteringHigh Current Metal-Ion Source for Activated DepositionField-Induced Deposition of Hard C-H Coatings on the Steel Surface in a Rich-Propane Flame FlowCVD Deposition and Characterisation of Highly Conductive ZnOEffects of Reaction Temperature on the Physical Properties of Chemically Deposited Cds FilmsPhase Change during the Initial of Ni30Fe70(Invar) Films on MgO(001) by DC-Biased Plasma-Sputter-DepositionThermal- and Photo-Induced Changes of the Optical Properties of Amorphous As3Se2 Thin FilmsStructural Invetigations of Sputtered Thin Films with X-Ray Absorption TechniquesThin Film Properties of Ge-Containing Chalcogenide GlassesA New Method for the Optical Characterization of Inhomogeneous Thin Films Based Only on Spectroscopic Reflection MeasurementsSolid Solution CdxZn1-xS Thin Films Grown by Atomic Layer Epitaxy and Successive Ionic Layer Adsorption and Reaction TechniquesHigh Rates of Diamond Deposition with Various Crystals Sizes by Combustion Flame MethodTribological Behaviour of Diamond Coatings Obtained by Combustion Flame ProcessInfluence of Plasma Conditions on the Deposition of Superhard Amorphous Carbon Films by Laser and Arc MethodsDeposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron SputteringCorrelation between Deposition Rate and Hardness of Remote PECVD Silicon Oxide FilmsStudy of the Growth Mechanisms and Properties of (Cr,O,N) Films Deposited by Vacuum Arc EvaporationMeasurements of the Loss Probability of Nitrogen Atoms versus Temperature on AluminiumTheoretical Investigations of the Multitarget Reactive Sputtering Process: Application to the Titanium - Chromium - Oxygen SystemOn the Use of SNMS for the Manufacture Control of Ag Colloid Containing Sol-Gel Fillms on GlassSelf Organization of Nanostructures during Surface Segregation of S on TiDirect Writing of Metallic Nanostructures by Means of Metal ColloidsAmorphous and Crystalline States in Thin Films of N2OThin Film Electrodes for Capacitive Chemo- and Biosensors: An Optimization of the Electrodes GeometryCapacitive Study of Self-Assembled Alkylthiol Monolayers: Surface Charge Effects and Kinetics of Surfactants AdsorptionNew Class of Thin Amorphous Films Produced by PE CVD from Orangic Compounds of Carbon FamilyEffect of Tensile Stress-Annealing on the Magnetical Behaviour of Some Thin Amorphous Ribbons for Fluxgate SensorsMagnetic Domains in Microstructured Thin Films with Perpendicular AnisotropyMicromagnetics of Magnetic MultilayersWhy Evaporated Permalloy/Cu Multilayers Do not Exhibit GMR Effect: In-situ Transport PropertiesStructure of Laser-Deposited Fe/Al MultilayersInvestigations in the Structure Properties of Magnetooptical Multilayers with Fe, Tb and NdEffect of Sm Concentration and Ar Sputtering Gas Pressure on Magnetic Properties of SmCo/Cr FilmsMagneto-Optical Fe/Tb/Nd/Tb Multilayers: Anisotropy and Kerr RotationTheoretical Analysis of the Evolution of Composition Profiles in Nanoscale MultilayersCoulomb Blockade and Single Electron Effects in Arrays of Selforganized Ultrasmall Metal Clusters Observed at Room TemperatureFractal Analysis of Island Structures of Al Thin FilmsMagnetic and Magneto-Optical Properties of Composite Films of Ferromagnetic Ultrafine Particles Dispersed in Polymethyl MethacrylateOptical Properties of Coatings with Cu and Copper Oxide Colloidal Particles in a SiO2 MatrixIn Situ Preparation of Metal, Metaloxide and Metalnitride Films by Ion Beam SputteringTexture Control of TiN Films Deposited by a Dual Ion Beam IBADInfluence of Deposition Parameters on the Properties of Titanium Nitride Films Formed by Ion Beam Assisted EvaporationSpin Tunneling and Coulomb Blockade in Co-Al2O3-Permalloy Tunnel JunctionsFerromagnetic Resonance in Granular Co/Ag and NiFe/Ag MultilayersGiant Magnetostriction in TbFe/FeCo MultilayersInfluence of the Annealing Process on the GMR Effect in Permalloy/Copper MultilayersPresence and Absence of Giant Magnetoresistance in Sputtered and Evaporated Permalloy/Copper MultilayersApplication of Bioactive Layers for Chemical Sensors and Analysis SystemsSimulations of the Electrical Properties of Bilayer Lipid MembranePseudomorphous Ti Thin Layer in Ti/MgO Superlattices and on MgO(001) SubstratesUnusual Growth Modes in Pulsed Laser Deposition of ZnSe Thin Films on GaAsStudy of the Growth Mechanisms of Chromium Nitride Films Deposited by Ion PlatingEffect of Schwoebel Barriers on Growth Mechanisms and Morphology of Thin Film