Semiconductor-On-Insulator Materials for Nanoelectronics Applications

2011
ISBN: 978-3-642-26708-6
Verlag: Springer

Buch, Englisch, 447 Seiten, Previously published in hardcover, Format (B × H): 155 mm x 235 mm, Gewicht: 692 g

Reihe: Engineering Materials

"Semiconductor-On-Insulator Materials for NanoElectronics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.

Zielgruppe

Research

Autoren/Hrsg.

Nazarov, Alexei

Colinge, J.-P.

Balestra, Francis

Raskin, Jean-Pierre

Gamiz, Francisco

Lysenko, V.S.

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Halb- und Supraleitertechnologie
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Biomaterialien, Nanomaterialien, Kohlenstoff
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik

Inhaltsverzeichnis

New semiconductor-on-insulator materials.- Physics of modern SemOI devices.- Diagnostics of the SOI devices.- Sensors and MEMS on SOI.