An Introduction to Surface-Micromachining

Softcover Nachdruck of the original 1. Auflage 2004
ISBN: 978-1-4757-1077-9
Verlag: Springer US

Buch, Englisch, 189 Seiten, Format (B × H): 155 mm x 235 mm, Gewicht: 318 g

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An Introduction to Surface-Micromachining connects the manufacturing process, microscale phenomena, and design data to physical form and function.
This book will be of interest to mechanical engineers looking to scale down into micromachining and microelectronics designers looking to move horizontally to micromachining.

Zielgruppe

Research

Autoren/Hrsg.

Parmaswaran, Ash

Johnstone, Robert W.

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau
• Technische Wissenschaften Energietechnik | Elektrotechnik Elektrotechnik

Inhaltsverzeichnis

1. Introduction.- 1.1 Why miniaturize?.- 1.2 Why surface-micromachining?.- 1.3 History.- References.- I Fabrication.- 2. Microfabrication Processes.- 3. Micromachining Technologies.- II Design.- 4. Microscale Physics.- 5. Mechanics.- 6. Design Rules.- 7. Non-Ideal Processes.- 8. Design Techniques.- III Devices.- 9. Electrical Components.- 10. Mechanical Components.- 11. Electrostatic Actuators.- 12. Electro-Thermal-Compliant Actuators.- 13. Raised Structures.- IV Processes.- 14. PolyMUMPsTM Process.- 15. SUMMiTTM Process.- 16. MUSiC® Process.