Sonstiges, Englisch, 546 Seiten, Format (B × H): 125 mm x 142 mm, Gewicht: 200 g
Sonstiges, Englisch, 546 Seiten, Format (B × H): 125 mm x 142 mm, Gewicht: 200 g
ISBN: 978-3-03859-797-1
Verlag: Trans Tech Publications
State-of-the-art reviews on all the major areas of interest are brought together in this book, namely the role of hydrogen during epitaxial growth, its entry into the material during processing, its subsequent diffusivity and bonding with dopants, other impurities or defects, its effect on device performance and reliability and positive uses for hydrogen in passivating surfaces.
Autoren/Hrsg.
Weitere Infos & Material
Hydrogen in Compound Semiconductors-IntroductionThe Role of Hydrogen in UHV Growth of III-V SemiconductorsThe Role of Hydrogen in the Growth of III-V Compound Semiconductors by OMVPERole of Hydrogen in Semiconductor, Dielectric and Metal Deposition onto InP by Means of Rapid Thermal Low Pressure Metalorganic Chemical Vapor DepositionHydrogenation of III-V Semiconductors during ProcessingSources of Hydrogen in III-V Device ProcessingPlasma Passivation of III-V Semiconductor SurfacesHydrogen Implantation in III-V Compound Semiconductors and its Redistribution with AnnealingHydrogen Diffusion in Compound SemiconductorsVibrational Spectroscopy of Dopant-Hydrogen Complexes in III-V Semiconductors Hydrogen in Crystalline Gallium PhosphideHydrogen in Ternary and Quaternary MaterialsShallow Levels Passivation in Implanted and Plasma Hydrogenated Compound SemiconductorsTheoretical and ?SR Studies Related to Hydrogen in Compound SemiconductorsHydrogen in III-V Compound SemiconductorsSpectroscopy of Hydrogen-Related Defects in III-V Semiconductors by Nuclear TechniquesHydrogen in III-V Device Structures
