Levitation Micro-Systems

Applications to Sensors and Actuators
1. Auflage 2021
ISBN: 978-3-030-58907-3
Verlag: Springer International Publishing

Buch, Englisch, 174 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 448 g

Reihe: Microsystems and Nanosystems

This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.

Zielgruppe

Research

Autoren/Hrsg.

Poletkin, Kirill

Fachgebiete

• Technische Wissenschaften Technik Allgemein Nanotechnologie
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde

Inhaltsverzeichnis

Introduction to levitation micro-systems.- Micro-fabrication techniques.- Analytical modelling.- Quasi-finite element modelling.- Inductive levitation micro-systems.- Hybrid levitation micro-systems.- Mechanical thermal noise in levitated micro-gyroscopes.

Über Autor(innen)

Kirill Poletkin obtained hisPh.D. degree at Moscow Aviation Institute (Moscow State Aviation Technological University), Russia in 2007. Since 2016, he is a scientist at Karlsruhe Institute of Technology as a scientist. In 2020, he is also appointed as an assistant professor at Innopolis University. His research interest includes micro- and nano-scales electromechanical devices and processes of the energy transfer within these scales.