Buch, Englisch, 408 Seiten, Previously published in hardcover, Format (B × H): 155 mm x 235 mm, Gewicht: 639 g
Buch, Englisch, 408 Seiten, Previously published in hardcover, Format (B × H): 155 mm x 235 mm, Gewicht: 639 g
ISBN: 978-3-642-08232-0
Verlag: Springer
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Zielgruppe
Research
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Robotik
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikroprozessoren
- Mathematik | Informatik EDV | Informatik Informatik Künstliche Intelligenz Wissensbasierte Systeme, Expertensysteme
- Technische Wissenschaften Technik Allgemein Mathematik für Ingenieure
- Mathematik | Informatik EDV | Informatik Daten / Datenbanken Informationstheorie, Kodierungstheorie
- Interdisziplinäres Wissenschaften Wissenschaften: Forschung und Information Informationstheorie, Kodierungstheorie
- Mathematik | Informatik EDV | Informatik Informatik Rechnerarchitektur
Weitere Infos & Material
1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.
