Introduction to Microsystem Design

2. Auflage 2015
ISBN: 978-3-662-47022-0
Verlag: Springer

Buch, Englisch, 374 Seiten, HC runder Rücken kaschiert, Format (B × H): 160 mm x 241 mm, Gewicht: 7214 g

Reihe: RWTHedition

This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

Zielgruppe

Research

Autoren/Hrsg.

Schomburg, Werner Karl

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Sensorik
• Technische Wissenschaften Technik Allgemein Konstruktionslehre und -technik

Inhaltsverzeichnis

Scaling Laws.- Elastic deformations.- Thin Films.- Conductor Paths.- Electrical Measurements.- Membranes.- Strain gauges on membranes.- Beams.- Vibrations.- Capillaries.- Capacitive forces.- Piezoelectric effect.- Thermal actuators.- Micro optics.- Diffusion.- Micro valves.- Micro pumps.- Micro dosing.- Analogies of physical domains.- Mechanical devices for electronics.