Sonstiges, Englisch, Band 1066, 576 Seiten, Compact disk (CD-ROM), Format (B × H): 216 mm x 279 mm
Reihe: AIP Conference Proceedings / Materials Physics and Applications
17th International Conference on Ion Implantation Technology
Sonstiges, Englisch, Band 1066, 576 Seiten, Compact disk (CD-ROM), Format (B × H): 216 mm x 279 mm
Reihe: AIP Conference Proceedings / Materials Physics and Applications
ISBN: 978-0-7354-0634-6
Verlag: AIP Press
The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).
Zielgruppe
Research
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Halb- und Supraleitertechnologie
- Naturwissenschaften Physik Elektromagnetismus Halbleiter- und Supraleiterphysik
