Medienkombination, Englisch, Band 788, 667 Seiten, mit 1 CD-ROM, Format (B × H): 216 mm x 279 mm
Reihe: AIP Conference Proceedings / Materials Physics and Applications
Medienkombination, Englisch, Band 788, 667 Seiten, mit 1 CD-ROM, Format (B × H): 216 mm x 279 mm
Reihe: AIP Conference Proceedings / Materials Physics and Applications
ISBN: 978-0-7354-0277-5
Verlag: AIP Press
The worldwide semiconductor community faces increasingly difficult challenges in the era of silicon nanotechnology and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed.
Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continuing the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The book also covers emerging nano-devices and the corresponding metrology challenges that arise.
Zielgruppe
Research
Autoren/Hrsg.
Fachgebiete
- Naturwissenschaften Physik Physik Allgemein Experimentalphysik
- Technische Wissenschaften Technik Allgemein Physik, Chemie für Ingenieure
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Produktionstechnik Industrielle Qualitätskontrolle
- Technische Wissenschaften Technik Allgemein Technische Zuverlässigkeit, Sicherheitstechnik
