Microelectronics Manufacturing

Principles and Technology
Erscheinungsjahr 2027
ISBN: 978-981-9260-90-4
Verlag: Springer

Buch, Englisch, Format (B × H): 155 mm x 235 mm

The book presents a clear and logical framework of microelectronic fabrication processes, covering fundamental theories (e.g., semiconductor physics, doping principles) to advanced techniques (e.g., EUV lithography, 3D integration). It not only provides solid content on traditional CMOS processes but also introduces emerging device technologies such as FinFET and GAA, keeping pace with industry advancements. This makes it suitable as both a university textbook and an engineering reference.

Unlike purely theoretical works, this book bridges abstract principles with practical applications through process simulation case studies, key parameter optimization (e.g., etch selectivity, thin-film uniformity), and real-world production line challenges (e.g., defect control, yield improvement). It helps readers develop a closed-loop understanding of "theory–process–device performance."

Zielgruppe

Research

Autoren/Hrsg.

Tian, Li

Li, Ling

Ren, Mingyuan

Liu, Hongmei

Ban, Chuncheng

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik
• Naturwissenschaften Chemie Chemie Allgemein

Inhaltsverzeichnis

Overview of Microelectronics Manufacturing Technology.- Properties of Single-Crystal Silicon.- Epitaxy.- Oxidation.- Diffusion.- Ion Implantation.- Chemical Vapor Deposition.- Physical Vapor Deposition.- Photolithography.- Lithography Techniques.- Etching Techniques.- Process integration.- Process monitoring.- Packaging and testing.

Über Autor(innen)

Li Tian is a senior engineer at the Department of Microelectronics Science and Technology, Harbin Institute of Technology,China. She is an experienced researcher with over 25 years of teaching and research experience in microelectronics science and engineering. She authored textbooks including "Integrated Circuit Manufacturing Technology" and developed the national first-class undergraduate course "Microelectronics Processing". She has earned her second prize in provincial/ministerial-level textbook awards, along with first prize for Heilongjiang Provincial Teaching Achievement, China. Her research focuses on flexible electronic devices and microsystems, bio-chemical microelectromechanical systems, device reliability, and other micro-nano technology fields. 

Ling Li, Harbin Institute of Technology. Research areas focus on micro-nano devices and systems, intelligent micro-nano energy, nano-sensors, etc. Ling Li has published more than 40 academic papers in recent years, and presided over a dozen national projects. The Li’s group has rich experience in nanoelectronic devices processing. She obtained several Advanced Individual Awards and she is the director of CSMNT, as well as the secretary of IEEE Harbin EDS/PHO chapter.

Mingyuan Ren received his Ph.D. degree in Microelectronics and Solid-State Electronics from Harbin Institute of Technology, Harbin, China, in 2016. He worked in the Integrated Circuit Design and Integrated Systems major at Harbin University of Science and Technology from July 2007 to April 2021. He is currently a professor of Jinhua Institute of Advanced Technology. His research interests include integrated circuits and sensor readout circuits. He has published more than 30 journal papers and obtained more than 10 authorized invention patents.

Hongmei Liu, born in 1976, received her Ph.D. from Harbin Engineering University in 2009.She is currently an Associate Professor and Master's Supervisor at the College of Electronic Engineering, Heilongjiang University. Her current research interests focus on MEMS technology and the preparation of functional materials and devices.

Chuncheng Ban, a master's supervisor with a doctoral degree, graduated from Harbin Institute of Technology and currently serves as a teacher and master's supervisor in the Department of Electronic Science and Technology at Heilongjiang University. His main research areas include MEMS technology and research on ultra-low frequency piezoelectric devices, as well as the preparation and integration of low dimensional semiconductor piezoelectric materials and sensor devices.