Handbook of Optical Metrology

Principles and Applications, Second Edition
2. Auflage 2015
ISBN: 978-1-4665-7359-8
Verlag: CRC Press

Buch, Englisch, 920 Seiten, Format (B × H): 183 mm x 254 mm, Gewicht: 1837 g

Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text:

- Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements

- Addresses interferometry, holography, and speckle methods and applications

- Explains Moiré metrology and the optical heterodyne measurement method

- Delves into the specifics of diffraction, scattering, polarization, and near-field optics

- Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes

This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

Autoren/Hrsg.

Yoshizawa, Toru

Fachgebiete

• Technische Wissenschaften Sonstige Technologien | Angewandte Technik Lasertechnologie, Holographie
• Technische Wissenschaften Technik Allgemein Technische Optik, Lasertechnologie

Inhaltsverzeichnis

Light Sources. Lenses, Prisms, and Mirrors. Optoelectronic Sensors. Optical Devices and Optomechanical Elements. Propagation of Light. Interferometry. Holography. Speckle Methods and Applications. Moiré Metrology. Optical Heterodyne Measurement Method. Diffraction. Light Scattering. Polarization. Near-Field Optics. Length and Size. Displacement. Straightness and Alignment. Flatness. Surface Profilometry. Three-Dimensional Shape Measurement. Fringe Analysis. Photogrammetry. Optical Methods in Solid Mechanics. Optical Methods in Flow Measurement. Polarimetry. Birefringence Measurement. Ellipsometry. Optical Thin Film and Coatings. Film Surface and Thickness Profilometry. Optical Coherence Tomography for Industrial Applications. Interference Microscopy for Surface Structure Analysis. Noncontact Dimensional and Profile Metrology by Video Measurement. Optical Metrology in Manufacturing Technology. On-Machine Measurements.

Über Autor(innen)

Toru Yoshizawa received his BS, MS, and doctorate of engineering from the University of Tokyo, Japan. After ten years of research and educational works at Yamanashi University, Kofu, Japan, he moved to Tokyo University of Agriculture and Technology, Japan, where he was professor in the Department of Mechanical Systems Engineering for 25 years. After retirement from the university, he worked in industry for three years, and then moved to Saitama Medical University, Japan to explore medical and biomedical fields using optical techniques. Currently he is director at Non-Profit Organization 3D Associates, Yokohama, Japan, and professor emeritus at Tokyo University of Agriculture and Technology.