E-Book, Englisch, 470 Seiten, Web PDF
Auciello / Flamm Plasma Diagnostics
1. Auflage 2013
ISBN: 978-1-4832-1624-9
Verlag: Elsevier Science & Techn.
Format: PDF
Kopierschutz: 1 - PDF Watermark
Discharge Parameters and Chemistry
E-Book, Englisch, 470 Seiten, Web PDF
ISBN: 978-1-4832-1624-9
Verlag: Elsevier Science & Techn.
Format: PDF
Kopierschutz: 1 - PDF Watermark
Plasma Diagnostics, Volume 1: Discharge Parameters and Chemistry covers seven chapters on the important diagnostic techniques for plasmas and details their use in particular applications. The book discusses optical diagnostic techniques for low pressure plasmas and plasma processing; plasma diagnostics for electrical discharge light sources; as well as Langmuir probes. The text also describes the mass spectroscopy of plasmas, microwave diagnostics, paramagnetic resonance diagnostics, and diagnostics in thermal plasma processing. Electrical engineers, nuclear engineers, microwave engineers, chemists, and technical personnel in universities, industry, and national laboratories will find the book invaluable.
Autoren/Hrsg.
Weitere Infos & Material
1;Front Cover;1
2;Discharge Parameters and Chemistry;4
3;Copyright Page;5
4;Table of Contents;6
5;Contributors;10
6;Preface;12
7;Chapter 1. Optical Diagnostic Techniques for Low Pressure Plasmas and Plasma Processing;14
7.1;I. Introduction;14
7.2;II. Plasma-Induced Optical Emission;16
7.3;III. Absorption Spectroscopy;28
7.4;IV. Laser Techniques;32
7.5;V. Optical Techniques for Plasma-Surface Interactions;48
7.6;VI. Summary;55
7.7;VII. Acknowledgments;56
7.8;References;56
8;Chapter 2. Plasma Diagnostics in Electric Discharge Light Sources;60
8.1;I. Introduction;60
8.2;II. Diagnostic Techniques Employed;70
8.3;III. Summary and Conclusions;120
8.4;IV. Acknowledgements;121
9;Chapter 3. How Langmuir Probes Work;126
9.1;I. Introduction;127
9.2;II. Interpretation of Semi-Infinite Planar Langmuir Probe Data;129
9.3;III. Effects of Finite Probe Size and Shape;143
9.4;IV. Effects of Ion-Neutral Collisions;151
9.5;V. Probes in Magnetic Fields;155
9.6;VI. Secondary Electron Effects;157
9.7;VII. Emissive Probes;159
9.8;VIII. Probe Perturbations;170
9.9;IX. Fluctuating Plasma Potentials;175
9.10;X. Probe Contamination;184
9.11;XI. Langmuir Probe Circuits;185
9.12;XII. Direct Electron Temperature Measurements;189
9.13;XIII. Directional Probe;193
9.14;XIV. Conclusion;194
9.15;XV. Acknowledgements;194
10;Chapter 4. Mass Spectrometry of Plasmas;198
10.1;I. Introduction;198
10.2;II. Plasma Flux Analysis;200
10.3;III. Partial Pressure Analysis;203
10.4;IV. Flux Analysis of Plasmas: Energy Selection and Mass Filtering;204
10.5;V. Mass Filtering;214
10.6;VI. Flux Analysis: Neutral Species;223
10.7;VII. Experimental Considerations and Applications: Flux Analysis of Plasmas;227
10.8;VIII. Experimental Considerations and Applications: Partial Pressure Analysis;232
10.9;IX. Acknowledgments;245
11;Chapter 5. Microwave Diagnostics;252
11.1;I. Introduction;252
11.2;II. How to Get Started: A Simple Microwave Diagnostic Apparatus;255
11.3;III. Cavity and Waveguide Diagnostic Techniques;262
11.4;IV. Interferometric Techniques;278
11.5;V. Microwave Scattering and Radiometry;293
11.6;VI. Plasma Waves and Their Applications in Microwave Diagnostics;297
12;Chapter 6. Paramagnetic Resonance as a Plasma Discharge Diagnostic;326
12.1;I. Introduction;326
12.2;II. Basic Theory;327
12.3;III. Application;345
12.4;IV. Discussion;357
12.5;V. Acknowledgements;359
13;Chapter 7. Diagnostics in Thermal Plasma Processing;362
13.1;I. Introduction;362
13.2;II. Methods for Production and Characterization of Plasmas;365
13.3;III. Specific Problems Related to Measurements Under Thermal Plasma Conditions;369
13.4;IV. Plasma Flow Diagnostics;375
13.5;V. Measurements of Particle Parameters in Thermal Plasmas;423
13.6;VI. Conclusions;452
13.7;VII. Acknowledgements;455
14;Index;460
15;Plasma-Materials Interactions;470
