Bahreyni Fabrication and Design of Resonant Microdevices

1. Auflage 2008
ISBN: 978-0-8155-1971-3
Verlag: Elsevier Science & Techn.
Format: EPUB
Kopierschutz: 6 - ePub Watermark

E-Book, Englisch, 250 Seiten

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.Offers numerous academic and industrial examples of resonant MEMSProvides an analytic model of device behaviourExplains two-port systems in detailDevotes ample space to excitation and signal detection methodsCovers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Autoren/Hrsg.

Bahreyni, Behraad