Banks Microengineering, MEMS, and Interfacing

A Practical Guide
Erscheinungsjahr 2006
ISBN: 978-1-4200-1541-6
Verlag: Taylor & Francis
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 352 Seiten

Reihe: Dekker Mechanical Engineering

MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone serious about entering the field must have a realistic knowledge of just what is possible with MEMS technologies as well as the myriad issues involved in fabrication and device integration.

Microengineering, MEMS, and Interfacing: A Practical Guide provides a straightforward, down-to-earth overview of the current state of MEMS technology. The first section systematically reviews the various bulk and surface micromachining methods, photolithography masks, and nonsilicon processes, examining their capabilities, limitations, and suggested uses. Next, the author details the characteristics of individual devices and systems, their advantages and shortcomings, and how they can be combined to achieve desired functionality. He includes condensed introductions to relevant chemistry and biochemistry and then demonstrates applications of MEMS in these areas. Beginning with a short introduction to electronics, the final section explores the issues involved in interfacing MEMS components with other systems.

With judicious use of illustrations to clarify the discussion, Microengineering, MEMS, and Interfacing: A Practical Guide offers hands-on tools for solving specific problems along with the insight necessary to use them most effectively.

Zielgruppe

Engineers, designers, and students involved in MEMS, NEMS, microsystems, micromachining, photolithography, and microstructural characterization and fabrication, as well as aerospace, mechanical, automotive, electronics, and electrical engineering.

Autoren/Hrsg.

Banks, Danny

Fachgebiete

• Technische Wissenschaften Technik Allgemein Technik: Allgemeines

Inhaltsverzeichnis

MICROMACHINING
. Introduction
Photolithography
. Introduction
. UV Photolithography
. X-Ray Lithography
. Direct-Write (E-Beam) Lithography
. Low-Cost Photolithography
. Photolithography-Key Points
. References
Silicon Micromachining
. Introduction
. Silicon
. Crystal Growth
. Doping
. Wafer Specifications
. Thin Films
. Structures in Silicon
. Wafer Dicing
. References
Nonsilicon Processes
. Introduction
. Chemical-Mechanical Polishing
. LIGA and Electroplating
. Photochemical Machining
. Laser Machining
. Polymer Microforming
. Electrical Discharge Machining
. Photostructurable Glasses
. Precision Engineering
. Other Processes
. References
Mask Design
. Introduction
. Minimum Feature Size
. Layout Software
. Design
. Design Rules
. Getting the Masks Produced
. Generating Gerber Files
. Mask Design-Key Points

MICROSYSTEMS
. Introduction
Microsensors
. Introduction
. Thermal Sensors
. Radiation Sensors
. Magnetic Sensors
. Chemical Sensors and Biosensors
. Microelectrodes for Neurophysiology
. Mechanical Sensors
Microactuators
. Introduction
. Electrostatic Actuators
. Magnetic Actuators
. Piezoelectric Actuators
. Thermal Actuators
. Hydraulic Actuators
. Multilayer Bonded Devices
. Microstimulators
Micro Total Analysis Systems
. Introduction
. Basic Chemistry
. Applications of Microengineered Devices in Chemistry and Biochemistry
. Micro Total Analysis Systems
. DNA Chips
. The Polymerase Chain Reaction (PCR)
. Conducting Polymers and Hydrogels
. References
Integrated Optics
. Introduction
. Waveguides
. Integrated Optics Components
. Fiber Coupling
. Other Applications
Assembly and Packaging
. Introduction
. Assembly
. Passivation
. Prepackage Testing
. Packaging
. Wire Bonding
. Materials for Prototype Assembly and Packaging
Nanotechnology
. Introduction
. The Scanning Electron Microscope
. Scanning Probe Microscopy
. Nanoelectromechanical Systems
. Langmuir-Blodgett Films
. Bionanotechnology
. Molecular Nanotechnology
. References

INTERFACING
. Introduction
Amplifiers and Filtering
. Introduction
. Op-Amp
. Instrumentation Amplifiers
. Wheatstone Bridge
. Filtering
. References
Computer Interfacing
. Introduction
. Driving Analog Devices from Digital Sources
. Analog-to-Digital Conversion
. Analog-to-Digital Converters
. Converter Summary
. References
Output Drivers
. Introduction
. Controlling Currents and Voltages with Op-Amps
. Transistors
. Relays
. BJT Output Boost for Op-Amps
. Optoisolators
Index