De Bona / Enikov Microsystems Mechanical Design

2006
ISBN: 978-3-211-48549-1
Verlag: Springer Wien
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, Band 478, 212 Seiten, eBook

Reihe: CISM International Centre for Mechanical Sciences

This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.

Zielgruppe

Research

Autoren/Hrsg.

De Bona, Francesco

Enikov, Eniko T.

Inhaltsverzeichnis

Preface.- Enikov, E. T., Introduction to Micro-Systems and to the Techniques for Their Fabrication.- De Bona, F., Microstructures Under Electrostatic Loads: Discrete System Modelling.- Brusa, E., Dynamics of Mechatronic Systems at Microscale.- De Bona, F., Munteanu, M. Gh., Continuum Microstructures Loaded Electrostatically.- Lazarov, K. V., Enikov, E. T., Design of Electro-Thermal micro-Positioners: Mechanics and Electronic Position Detection.- De Bona, F., Zelenika, S., Design of Compliant Micromechanisms.- Enikov, E. T., Micro- and Nano-assemby and Manipulation Techniques for MEMS.- Lee, L. M., Cheung, L. S. L., Zohar, Y., Microfluidics: Device Science and Technology.

Über Autor(innen)

Francesco De Bona, University of Udine, Italy. Eniko T. Enikov, University of Arizona, USA.