Fortin / Zribi Functional Thin Films and Nanostructures for Sensors

Synthesis, Physics and Applications
1. Auflage 2009
ISBN: 978-0-387-68609-7
Verlag: Springer-Verlag
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 214 Seiten

This book discusses advances in functional thin films for sensors and novel concepts for future breakthroughs. The focus is on guidelines and design rules for sensor systems, interaction between functional thin films and other sensor subsystems, fundamentals behind the intrinsic functionality in sensing thin films and nanostructures, state-of-the-art technologies used to develop sensors today and concrete examples of sensor designs.

Autoren/Hrsg.

Fortin, Jeffrey

Zribi, Anis

Inhaltsverzeichnis

1;Foreword;7
2;Series Preface;9
2.1;Integrated Analytical Systems;9
3;Preface;11
4;Editor Biographies;13
5;Contents;14
6;Contributors;15
7;Sensor Design Guidelines;16
7.1;The Big Picture;16
7.2;Sensor Architecture;18
7.3;Sensor Figures of Merit/Performance Attributes;19
7.4;Input Dynamic Range;20
7.5;Response Curve;20
7.6;Sensitivity;21
7.7;Response Time;22
7.8;Resolution;22
7.9;Accuracy;23
7.10;Precision;23
7.11;Hysteresis and Drift;23
7.12;Selectivity;23
7.13;Sensor Design Considerations;24
7.14;Selection and/or Invention of the Transduction Mechanism;24
7.15;Selection of Transducer Material;25
7.16;Physical and Chemical Considerations;26
7.17;Melting Point;26
7.18;Glass Transition Temperature;27
7.19;Elasticity and Plasticity;27
7.20;Viscosity;28
7.21;Optical Properties;29
7.22;Summary;30
7.23;References;31
8;Transduction Principles;32
8.1;Introduction;32
8.2;Piezoresistivity;34
8.3;Piezoelectricity;35
8.4;Electrical—Resistance, Capacitance, Impedance, Tunneling;37
8.5;Thermoelectricity Overview of Theory;40
8.6;Optical and Radiation Techniques Overview of Theory;41
8.7;Electrochemical Overview of Theory;42
8.8;Summary;43
8.9;References;44
9;Growth and Synthesis of Nanostructured Thin Films;45
9.1;Introduction;45
9.2;Gas Phase Fabrication Techniques;46
9.3;Thermal Vapor Transport Methods;47
9.4;Catalyst-Assisted Fabrication Methods;48
9.5;Physical Vapor Deposition Methods;49
9.6;Chemical Vapor Deposition Methods;51
9.7;Liquid Phase Fabrication Techniques;52
9.8;Sol–Gel Methods;53
9.9;Diblock Copolymer Methods;53
9.10;Spin Coating Methods;53
9.11;Electrochemical Deposition/Etching Methods;55
9.12;Electrospinning Methods;56
9.13;Template-Based Synthesis Techniques;58
9.14;Direct Replication Methods;58
9.15;Partial Replication Methods;59
9.16;Glancing Angle Deposition (GLAD);59
9.17;Oblique Angle Deposition (OAD);60
9.18;Glancing Angle Deposition (GLAD);62
9.19;Growth of Vertically Aligned Nanorod Arrays;63
9.20;Growth of Helical Nanostructures;64
9.21;Integration of Multilayered Nanorod Structures with Different Morphology;66
9.22;Integration of Multilayered Nanorod Structures with Different Materials;67
9.23;Phase Modulation: Controlling the Shape of the Nanorods;69
9.24;Phase Modulation: Controlling the Orientation of the Nanorods;70
9.25;Formation of Regular Array of Nanorods by Templates;72
9.26;Control of NSTF Film Porosity;72
9.27;Formation of Nanostructured Architectures on Optical Fiber;73
9.28;Summary on GLAD;76
9.29;References;76
10;Integrated Micromachining Technologies for Transducer Fabrication;79
10.1;Introduction;79
10.2;Micro- and Nanostructuring;80
10.3;Lithography;80
10.4;Pattern Transfer;84
10.5;Micro- and Nanostructure and Device Integration;87
10.6;Micro- and Nanostructures for Sensing;88
10.7;Sensitive Material Integration;90
10.8;Summary;94
10.9;References;94
11;Applications of Functional Thin Films and Nanostructures in Gas Sensing;99
11.1;Introduction;99
11.2;Nondispersive Infrared (NDIR) Systems Introduction;100
11.3;Theory of Absorption of Radiation Radiation;101
11.4;Absorption Spectra of Common Gases;102
11.5;Absorption Law;102
11.6;Nondispersive Mid-IR Gas-Sensing Systems Introduction;105
11.7;Source and Waveguide;105
11.8;Detector;106
11.9;Filter;109
11.10;GE-Telaire NDIR System Introduction;112
11.11;Telaire Low-Cost NDIR System;112
11.12;Mid-IR LEDs and MBE;113
11.13;Telaire’s CO;114
11.14;RCLED;114
11.15;Summary;115
11.16;References;116
12;Chemical Sensors: New Ideas for the Mature Field;117
12.1;Introduction;117
12.2;Requirements for Ideal and Practical Chemical Sensors;120
12.3;Concepts for Ubiquitous Chemical Sensors;123
12.4;Case Studies;125
12.5;Electrical Energy Transduction;125
12.6;Mechanical Energy Transduction;135
12.7;Radiant Energy Transduction;141
12.8;Summary;149
12.9;References;150
13;Applications of Functional Thin Films for Mechanical Sensing;158
13.1;Types of Mechanical Sensors and Sensing Principles;158
13.2;Principle of Transduction;159
13.3;Displacement Measurement Without Functional Thin Films;160
13.4;Displacement Sensing with Functional Films;160
13.5;Stress Sensing with Functional Films;161
13.6;Other Uses of Functional Films in Mechanical Sensors;161
13.7;Preparation of Functional Thin Films;161
13.8;Piezoelectric Films;162
13.9;Piezoresistive Films;163
13.10;Analysis of Displacement and Stress;165
13.11;Beam Displacement Analysis;167
13.12;Beam Stress Analysis;168
13.13;Membrane Displacement and Stress Analysis;170
13.14;Examples of Mechanical Sensors;172
13.15;Conclusions;176
13.16;References;177
14;Sensing Infrared and Terahertz Regions by Functional Films;179
14.1;Introduction;179
14.2;Intersubband Infrared Photodetectors Based on Quantum Heterostructures Intersubband Infrared Photodetectors;180
14.3;QWIP, QRIP, and QDIP Structures and Principles of Operation;181
14.4;Comparison of Dark Currents in QWIPs, QRIPs, and QDIPs;184
14.5;Capture Probability;187
14.6;Responsivity and Photoelectric Gain;190
14.7;Detectivity;192
14.8;Conclusions;196
14.9;Sensing THz Region;197
14.10;Impurity in Quantum Well Structures;197
14.11;Confined Acceptors;198
14.12;Theory of Confined Acceptors in QW;200
14.13;Plasma Waves and Oscillations in Two-Dimensional Electron Systems;203
14.14;Resonant Detection of THz Radiation Using Excitation of Plasma Oscillations;208
14.15;Comments;210
14.16;Ultrasensitive THz Detector Using Cold-Electron Bolometer;211
14.17;Optimization of the CEB in Presence of the Background Power Load;214
14.18;Ultimate Noise Performance of CEB-General NEP Formula;216
14.19;Summary;218
14.20;References;218
15;Index;222