Lang Multi-Wafer Rotating MEMS Machines

Turbines, Generators, and Engines
1. Auflage 2009
ISBN: 978-0-387-77747-4
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 456 Seiten

Reihe: MEMS Reference Shelf

The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.

Autoren/Hrsg.

Lang, Jeffrey

Inhaltsverzeichnis

1;Preface;6
2;Contents;8
3;Contributors;15
4;Introduction to PowerMEMS;16
4.1;1.1 Compact Portable Power Considerations;17
4.2;1.2 Chemical Energy Sources;18
4.3;1.3 Power System Considerations;21
4.4;1.4 Conclusion;22
4.5;Reference;23
5;System Design Considerations and Device Overview;24
5.1;2.1 Introduction;24
5.2;2.2 Thermodynamic and Scaling Considerations;24
5.3;2.3 Overview of an MEMS Gas Turbine Engine Design;28
5.4;2.4 Bearings and Rotor Dynamics;30
5.5;2.5 Turbomachinery Fluid Mechanics;32
5.6;2.6 Structures and Materials;34
5.7;2.7 Combustion;35
5.8;2.8 Engine Controls and Accessories;38
5.9;2.9 Engine Design Trades, Component Integration, and Design Evolution;43
5.10;2.10 Summary;45
5.11;References;46
6;Materials, Structures and Packaging;48
6.1;3.1 Introduction;48
6.2;3.2 The Effect of Scale and the Choice of Materials;49
6.3;3.3 Design for Room Temperature Strength;51
6.4;3.4 Design for High-Temperature Strength;54
6.5;3.5 Use of Silicon Carbide in Hybrid Structures;58
6.6;3.6 Packaging;65
6.7;3.7 Summary;68
6.8;References;68
7;Microengine Fabrication;71
7.1;4.1 Introduction;71
7.2;4.2 Microengine Devices;71
7.3;4.3 Basic Fabrication Processes;75
7.4;4.4 Critical Microengine Fabrication Processes;97
7.5;4.5 SSE Fabrication;144
7.6;4.6 Summary and Outlook;164
7.7;References;167
8;Fabrication of Microscale Rotating Magnetic Machines;171
8.1;5.1 Introduction;171
8.2;5.2 Basic Principles/Structures;173
8.3;5.3 Challenges for Microscale Magnetic Machines;173
8.4;5.4 Coils;176
8.5;5.5 Soft Magnets;179
8.6;5.6 Hard Magnets;184
8.7;5.7 Integration in Multi-Wafer Silicon Process;192
8.8;5.8 Example Devices;194
8.9;5.9 Summary;200
8.10;References;202
9;High-Speed Gas Bearings for Micro- Turbomachinery;205
9.1;6.1 Introduction;205
9.2;6.2 Related Work;207
9.3;6.3 Challenges and Unknowns;208
9.4;6.4 Rotordynamic Considerations for MEMS Turbomachinery;210
9.5;6.5 Analysis of Hydrostatic Gas Journal Bearings;214
9.6;6.6 Whirl Instability in Ultra-Short Gas Journal Bearings;225
9.7;6.7 Analysis of Hydrostatic Gas Thrust Bearings;247
9.8;6.8 Annular Seals;270
9.9;6.9 Experimental Considerations;278
9.10;6.10 Design Implications;284
9.11;6.11 Summary;288
9.12;Nomenclature;289
9.13;References;290
10;Thermofluidics and Turbomachinery;293
10.1;7.1 Introduction;293
10.2;7.2 Implication of Scale;295
10.3;7.3 Microscale Compressor Design and Analysis;310
10.4;7.4 Microturbine Design;327
10.5;7.5 MEMS Turbocharger;328
10.6;7.6 Summary;335
10.7;References;335
11;Motors and Generators;338
11.1;8.1 Background;339
11.2;8.2 Modeling Simplifications;349
11.3;8.3 Electric Induction Machine;350
11.4;8.4 Permanent-Magnet Synchronous Machine;376
11.5;8.5 Summary;413
11.6;References;413
12;Microcombustors for Rotating Machinery;418
12.1;9.1 Introduction;418
12.2;9.2 Basic Combustion Concepts;420
12.3;9.3 Microcombustor Challenges;424
12.4;9.4 Homogeneous Gas-Phase Microcombustor Development;429
12.5;9.5 Heterogeneous Catalytic Microcombustor Development;443
12.6;9.6 Fabrication and Packaging;456
12.7;9.7 Summary;463
12.8;References;465
13;Index;466