Madou Manufacturing Techniques for Microfabrication and Nanotechnology

1. Auflage 2011
ISBN: 978-1-4398-9530-6
Verlag: Taylor & Francis
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 670 Seiten

Designed for science and engineering students, Manufacturing Techniques for Microfabrication and Nanotechnology focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies, detailing those that differ the most from the miniaturization processes used to fashion ICs. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Readers should use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Zielgruppe

Graduate and undergraduate students, mechanical engineers, materials scientists, electrical engineers, physicists, biomedical engineers, and chemists.

Autoren/Hrsg.

Madou, Marc J.

Fachgebiete

• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Biotechnologie Biotechnologie: Mikrotechnologie, Nanobiotechnologie

Inhaltsverzeichnis

Lithography:
Photolithography. Next-Generation Lithographies and Lithography Research.
Pattern Transfer with Subtractive Techniques:
Dry Etching. Wet Chemical Etching and Wet Bulk Micromachining—Pools as Tools. Thermal Energy-Based Removing. Mechanical Energy-Based Removing.
Pattern Transfer with Additive Techniques:
Physical and Chemical Vapor Deposition—Thin Film Properties and Surface Micromachining. Chemical, Photochemical and Electrochemical Forming Techniques. Thermal Energy-Based Forming Techniques—Thermoforming. Micro-Molding Techniques—LIGA.