Ostasevicius / Dauksevicius Microsystems Dynamics

1. Auflage 2010
ISBN: 978-90-481-9701-9
Verlag: Springer-Verlag
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 214 Seiten

In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.

Autoren/Hrsg.

Ostasevicius, Vytautas

Dauksevicius, Rolanas

Inhaltsverzeichnis

1;Preface;6
2;Contents;8
3;Chapter 1: Introduction;10
3.1;1.1 Review of Microelectromechanical Systems (MEMS);10
3.2;1.2 MEMS Production Technologies;12
3.3;1.3 Common MEMS Actuators;12
3.4;1.4 RF MEMS and Microswitches;13
3.5;1.5 Applications of MEMS Micromotors;14
3.6;1.6 Importance of Dynamics;16
3.7;References;17
4;Chapter 2: Modeling and Simulation of Contact-Type Electrostatic Microactuator;20
4.1;2.1 Three-Dimensional Finite Element Model of a Microcantilever;20
4.2;2.2 Finite Element Modeling and Simulation of Fluidic-Structural Interaction;22
4.2.1;2.2.1 Model Formulation;22
4.2.2;2.2.2 Numerical Analysis of Influence of Squeeze-Film Damping on Vibrations of Microcantilever;25
4.2.2.1;2.2.2.1 Modal Analysis;25
4.2.2.2;2.2.2.2 Frequency Response Analysis;25
4.2.2.3;2.2.2.3 Time-Dependent Analysis;31
4.3;2.3 Finite Element Modeling and Simulation of Electrostatic-Structural Interaction;37
4.3.1;2.3.1 Model Formulation;37
4.3.2;2.3.2 Numerical Analysis of Microswitch Operational Characteristics;41
4.3.2.1;2.3.2.1 Static Simulations;42
4.3.2.2;2.3.2.2 Dynamic Simulations;48
4.4;2.4 Finite Element Modeling and Simulation of Vibro-Impact Interaction;53
4.4.1;2.4.1 Model Formulation;53
4.4.2;2.4.2 Numerical Analysis of Contact Bouncing;55
4.5;References;60
5;Chapter 3: Dynamics of Elastic Vibro-Impact Microsystems;62
5.1;3.1 Mathematical Modeling;62
5.2;3.2 Free Transverse Impact Vibrations of Microcantilever;64
5.3;3.3 Temporal Characteristics of Vibro-Impact Microsystem with Rigid Support;72
5.4;3.4 Dynamic Characteristics of Microsystem Composed of Two Microcantilevers;77
5.5;3.5 Control of Vibration Modes of Links of Vibro-Impact Microsystems;95
5.6;3.6 Analysis of Forced Vibrations of Microcantilever;103
5.7;3.7 Vibrational Stability of Vibro-Impact Microsystems;112
5.8;3.8 Diagnostics of Parameters of Vibro-Impact Microsystems;116
5.9;3.9 Optimization Results for Structures Undergoing Periodic and Transient Vibrations;122
5.9.1;3.9.1 Optimization Results of Structures Undergoing Periodic Vibrations;123
5.9.2;3.9.2 Optimization Results for Structures Undergoing Transient Vibrations;131
5.10;References;141
6;Chapter 4: Theoretical Analysis of a Micromotor;142
6.1;4.1 Finite Element Modeling Procedure;143
6.2;4.2 Scaling in MEMS;146
6.3;4.3 Modal Analysis of a Microrotor;147
6.4;4.4 Dynamics of MEMS Structures in Viscous Medium;155
6.5;4.5 Modeling of Micromotor in Viscous Media;158
6.6;4.6 Control of a Micromotor;161
6.6.1;4.6.1 Analytical Model of a Micromotor;162
6.6.2;4.6.2 Simplified Electrostatic-Mechanical Scheme;169
6.6.3;4.6.3 Moment of Rotation Produced by a Single Pole;170
6.6.4;4.6.4 Modeling of Torque of a Micromotor;174
6.6.5;4.6.5 Micromotor Torque and Switching Sequences;180
6.7;References;191
7;Chapter 5: Technological Realization of MEMS Structures and Their Experimental Investigation;193
7.1;5.1 Fabrication of Micromotor Prototypes;194
7.2;5.2 Features of Produced Micromotors;196
7.3;5.3 Micromotor Control Device;199
7.4;5.4 Design of Electrostatic Microswitches;204
7.5;5.5 Surface Micromachining Technology for Fabrication of Microswitches;208
7.6;5.6 Electrical Probe Testing of Fabricated Microswitches;210
7.7;5.7 Laser Measurements of Microcantilever Vibrations;214
7.8;References;221