Buch, Englisch, 293 Seiten, Format (B × H): 138 mm x 216 mm, Gewicht: 540 g
From Mega-Bit to Giga-Bit
Buch, Englisch, 293 Seiten, Format (B × H): 138 mm x 216 mm, Gewicht: 540 g
ISBN: 978-90-5699-098-5
Verlag: Taylor & Francis
This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies—the longstanding technology driver of Si ULSI—as they advance from the 1 Kbit to the Gbit DRAM era.
Autoren/Hrsg.
Fachgebiete
Weitere Infos & Material
1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7.
SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation




