E-Book, Englisch, 402 Seiten
Ul-Hamid A Beginners' Guide to Scanning Electron Microscopy
1. Auflage 2018
ISBN: 978-3-319-98482-7
Verlag: Springer-Verlag
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)
E-Book, Englisch, 402 Seiten
ISBN: 978-3-319-98482-7
Verlag: Springer-Verlag
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)
- provides a concise and accessible introduction to the essentials of SEM
- includes a large number of illustrations specifically chosen to aid readers' understanding of key concepts
- highlights recent advances in instrumentation, imaging and sample preparation techniques
- offers examples drawn from a variety of applications that appeal to professionals from diverse backgrounds.
Autoren/Hrsg.
Weitere Infos & Material
1;Preface;7
2;Contents;9
3;Abbreviations;16
4;Symbols List;18
5;1: Introduction;22
5.1;1.1 What Is the SEM;22
5.2;1.2 Image Resolution in the SEM;22
5.3;1.3 Image Formation in the SEM;25
5.4;1.4 Information Obtained Using the SEM;25
5.5;1.5 Strengths and Limitations of the SEM;29
5.6;1.6 Brief History of the SEM Development;32
5.7;References;35
6;2: Components of the SEM;36
6.1;2.1 Electron Column;36
6.1.1;2.1.1 Electron Gun;38
6.1.1.1;2.1.1.1 Current Density and Brightness of the Electron Source;38
6.1.1.2;2.1.1.2 Size of the Electron Source;39
6.1.1.3;2.1.1.3 Stability of the Electron Source;41
6.1.1.4;2.1.1.4 Energy Spread of Electrons;41
6.2;2.2 Thermionic Emission Electron Guns;41
6.2.1;2.2.1 Tungsten Filament Gun;43
6.2.1.1;2.2.1.1 Material;43
6.2.1.2;2.2.1.2 Working Principle;44
6.2.1.3;2.2.1.3 Role of Self-Regulating Bias Resistor;45
6.2.1.4;2.2.1.4 Saturation;47
6.2.1.5;2.2.1.5 Advantages/Drawbacks;48
6.2.1.6;2.2.1.6 Service Lifetime;48
6.2.2;2.2.2 Lanthanum Hexaboride (LaB6) Emitter;49
6.2.2.1;2.2.2.1 Material;49
6.2.2.2;2.2.2.2 Tip Design;50
6.2.2.3;2.2.2.3 Advantages/Drawbacks;50
6.3;2.3 Field Emission Electron Guns;51
6.3.1;2.3.1 Working Principle;51
6.3.2;2.3.2 Advantages/Drawbacks;52
6.3.3;2.3.3 Cold Field Emitter (Cold FEG);53
6.3.3.1;2.3.3.1 Working Principle;53
6.3.3.2;2.3.3.2 Service Lifetime;54
6.3.3.3;2.3.3.3 Advantages/Drawbacks;55
6.3.4;2.3.4 Schottky Field Emitter;55
6.3.5;2.3.5 Recent Advances;57
6.4;2.4 Electromagnetic Lenses;58
6.4.1;2.4.1 Condenser Lens;60
6.4.2;2.4.2 Apertures;62
6.4.3;2.4.3 Objective Lens;62
6.4.3.1;2.4.3.1 Pinhole Lens;62
6.4.3.2;2.4.3.2 Immersion Lens;63
6.4.3.3;2.4.3.3 Snorkel Lens;63
6.4.4;2.4.4 Lens Aberrations;65
6.4.4.1;2.4.4.1 Spherical Aberration;65
6.4.4.2;2.4.4.2 Chromatic Aberration;66
6.4.4.3;2.4.4.3 Diffraction at Aperture;68
6.4.4.4;2.4.4.4 Astigmatism;69
6.4.4.5;2.4.4.5 Effective Probe Diameter;71
6.4.5;2.4.5 Scan Coils;73
6.4.6;2.4.6 Magnification;74
6.5;2.5 Specimen Chamber;77
6.5.1;2.5.1 Specimen Stage;77
6.5.2;2.5.2 Infrared Camera;79
6.6;2.6 Detectors;80
6.6.1;2.6.1 Everhart-Thornley Detector;80
6.6.1.1;2.6.1.1 Working Principle;80
6.6.1.2;2.6.1.2 Efficiency of Signal Collection;83
6.6.1.3;2.6.1.3 Types of Signals Collected;84
6.6.1.4;2.6.1.4 Advantages of E-T Detector;85
6.6.2;2.6.2 Through-the-Lens (TTL) Detector;85
6.6.3;2.6.3 Backscattered Electron Detector;87
6.6.3.1;2.6.3.1 Working Principle;87
6.6.3.2;2.6.3.2 Advantages/Drawbacks;90
6.6.3.3;2.6.3.3 Scintillator BSE Detector;92
6.6.3.4;2.6.3.4 Channel Plate Detector;92
6.7;2.7 Miscellaneous Components;92
6.7.1;2.7.1 Computer Control System;92
6.7.2;2.7.2 Vacuum System;93
6.7.3;2.7.3 High-Voltage Power Supply (HT Tank);95
6.7.4;2.7.4 Water Chiller;95
6.7.5;2.7.5 Heater;96
6.7.6;2.7.6 Anti-vibration Platform;96
6.8;References;97
7;3: Contrast Formation in the SEM;98
7.1;3.1 Image Formation;98
7.1.1;3.1.1 Digital Imaging;99
7.1.2;3.1.2 Relationship Between Picture Element and Pixel;101
7.1.3;3.1.3 Signal-to-Noise Ratio (SNR);103
7.1.4;3.1.4 Contrast Formation;106
7.2;3.2 Beam-Specimen Interaction;107
7.2.1;3.2.1 Atom Model;107
7.2.2;3.2.2 Elastic Scattering;108
7.2.3;3.2.3 Inelastic Scattering;109
7.2.4;3.2.4 Effect of Electron Scattering;110
7.2.5;3.2.5 Interaction Volume;111
7.2.5.1;3.2.5.1 Effect of Beam Energy on Interaction Volume;111
7.2.5.2;3.2.5.2 Effect of Atomic Number on Interaction Volume;112
7.2.5.3;3.2.5.3 Effect of Tilt on Interaction Volume;114
7.2.6;3.2.6 Electron Range;114
7.3;3.3 Origin of Backscattered and Secondary Electrons;116
7.3.1;3.3.1 Origin of Backscattered Electrons (BSE);116
7.3.2;3.3.2 Origin of Secondary Electrons (SE);116
7.4;3.4 Types of Contrast;118
7.4.1;3.4.1 Compositional or Atomic Number (Z) Contrast (Backscattered Electron Imaging);118
7.4.1.1;3.4.1.1 Yield of Backscattered Electrons;118
7.4.1.2;3.4.1.2 Energy Distribution of BSE Yield;118
7.4.1.3;3.4.1.3 Effect of Beam Energy on BSE Yield;119
7.4.1.4;3.4.1.4 Effect of Atomic Number on BSE Yield;119
7.4.1.5;3.4.1.5 Effect of Tilt on BSE Yield;122
7.4.1.6;3.4.1.6 Effect of Crystal Structure on BSE Yield;122
7.4.1.7;3.4.1.7 Directional Dependence of BSE Yield;122
7.4.1.8;3.4.1.8 Collection Efficiency of the BSE Detector;125
7.4.1.9;3.4.1.9 Spatial Distribution of BSE;126
7.4.1.10;3.4.1.10 Formation of Compositional or Z Contrast with BSE;127
7.4.1.11;3.4.1.11 Spatial Resolution of BSE Images;131
7.4.1.12;3.4.1.12 Applications of Backscattered Electron Imaging;132
7.4.1.13;3.4.1.13 Limitations of Backscattered Electron Imaging;133
7.4.2;3.4.2 Topographic Contrast (Secondary Electron Imaging);134
7.4.2.1;3.4.2.1 Secondary Electron Yield;134
7.4.2.2;3.4.2.2 Escape Depth of SE;134
7.4.2.3;3.4.2.3 Energy Distribution of SE;135
7.4.2.4;3.4.2.4 Types of SE Signal (SE1, SE2, SE3, SE4);136
7.4.2.5;3.4.2.5 Effect of Beam Energy on SE Yield;139
7.4.2.6;3.4.2.6 Effect of Atomic Number on SE Yield;141
7.4.2.7;3.4.2.7 Effect of Tilt on SE Yield;141
7.4.2.8;3.4.2.8 Directional Dependence of SE Yield;143
7.4.2.9;3.4.2.9 Formation of Topographic Contrast with SE;143
7.4.2.9.1;E-T Detector;143
7.4.2.9.2;Factors Affecting Topographic Contrast;144
7.4.2.9.3;Edge Effect;145
7.4.2.9.4;Spherical Particles;147
7.4.2.9.5;Non-regular Specimens;147
7.4.2.9.6;Effect of Lateral Placement of E-T Detector;147
7.5;References;148
8;4: Imaging with the SEM;150
8.1;4.1 Resolution;150
8.1.1;4.1.1 Criteria of Spatial Resolution Limit;152
8.1.1.1;4.1.1.1 Rayleigh Criterion;152
8.1.1.2;4.1.1.2 Sparrow Criterion;153
8.1.1.3;4.1.1.3 Schuster´s Criterion;153
8.1.1.4;4.1.1.4 Houston Criterion;153
8.1.1.5;4.1.1.5 Buxton Criterion;153
8.1.1.6;4.1.1.6 Edge Resolution;153
8.1.1.7;4.1.1.7 Radial Intensity Distribution;153
8.1.1.8;4.1.1.8 Maximum Spatial Frequency;154
8.1.2;4.1.2 Imaging Parameters That Control the Spatial Resolution;155
8.1.2.1;4.1.2.1 Probe Size;155
8.1.2.2;4.1.2.2 Beam Current;156
8.1.2.3;4.1.2.3 Convergence Angle of the Probe;156
8.1.2.4;4.1.2.4 Accelerating Voltage;157
8.1.3;4.1.3 Guidelines for High-Resolution Imaging;159
8.1.4;4.1.4 Factors that Limit Spatial Resolution;161
8.2;4.2 Depth of Field;162
8.3;4.3 Influence of Operational Parameters on SEM Images;167
8.3.1;4.3.1 Effect of Accelerating Voltage (Beam Energy);167
8.3.2;4.3.2 Effect of Probe Current/Spot Size;168
8.3.3;4.3.3 Effect of Working Distance;172
8.3.4;4.3.4 Effect of Objective Aperture;175
8.3.5;4.3.5 Effect of Specimen Tilt;178
8.3.6;4.3.6 Effect of Incorrect Column Alignment;180
8.4;4.4 Effects of Electron Beam on the Specimen Surface;181
8.4.1;4.4.1 Specimen Charging;181
8.4.1.1;4.4.1.1 Methods to Reduce Charge Buildup;184
8.4.2;4.4.2 Surface Contamination;187
8.4.3;4.4.3 Beam Damage;188
8.5;4.5 Influence of External Factors on SEM Imaging;189
8.5.1;4.5.1 Electromagnetic Interference;190
8.5.2;4.5.2 Floor Vibrations;190
8.5.3;4.5.3 Poor Microscope Maintenance;191
8.6;4.6 Summary of Operating Conditions and Their Effects;192
8.7;4.7 SEM Operation;193
8.7.1;4.7.1 Sample Handling;194
8.7.1.1;4.7.1.1 Sample Size;194
8.7.1.2;4.7.1.2 Sample Preparation;194
8.7.2;4.7.2 Sample Insertion;195
8.7.3;4.7.3 Image Acquisition;196
8.7.4;4.7.4 Microscope Alignment;197
8.7.5;4.7.5 Maintenance of the SEM;198
8.8;4.8 Safety Requirements;199
8.8.1;4.8.1 Radiation Safety;199
8.8.2;4.8.2 Safe Handling of the SEM and Related Equipment;200
8.8.3;4.8.3 Emergency;200
8.9;References;201
9;5: Specialized SEM Techniques;202
9.1;5.1 Imaging at Low Voltage;202
9.1.1;5.1.1 Electron Energy Filtering;203
9.1.1.1;5.1.1.1 E x B Filter;204
9.1.1.2;5.1.1.2 r-Filter;204
9.1.2;5.1.2 Detector Technology;204
9.1.2.1;5.1.2.1 Energy Selective Backscatter (EsB) Detector (Made by Zeiss);204
9.1.2.2;5.1.2.2 Upper Electron Detector, UED (Made by JEOL Ltd);204
9.1.2.3;5.1.2.3 Solid-State Backscattered Detector;207
9.1.3;5.1.3 Electron Beam Deceleration;207
9.1.4;5.1.4 Recent Developments;208
9.1.5;5.1.5 Applications;210
9.2;5.2 Imaging at Low Vacuum;210
9.2.1;5.2.1 Introduction;210
9.2.2;5.2.2 Brief History;211
9.2.3;5.2.3 Working Principle;211
9.2.4;5.2.4 Detector for Low Vacuum Mode;213
9.2.5;5.2.5 Gas Path Length;214
9.2.6;5.2.6 Applications;217
9.2.7;5.2.7 Latest Developments;218
9.3;5.3 Focused Ion Beam (FIB);218
9.3.1;5.3.1 Introduction;218
9.3.2;5.3.2 Instrumentation;223
9.3.2.1;5.3.2.1 Ion Sources;223
9.3.2.2;5.3.2.2 Lens System;225
9.3.2.3;5.3.2.3 Stage;225
9.3.2.4;5.3.2.4 Detector;225
9.3.3;5.3.3 Ion-Solid Interactions;225
9.3.4;5.3.4 Ion Imaging;226
9.4;5.4 STEM-in-SEM;227
9.4.1;5.4.1 Working Principle;227
9.4.2;5.4.2 Advantages/Drawbacks;229
9.4.3;5.4.3 Applications;229
9.5;5.5 Electron Backscatter Diffraction (EBSD);231
9.5.1;5.5.1 Brief History;232
9.5.2;5.5.2 Working Principle;232
9.5.3;5.5.3 Experimental Setup;234
9.5.4;5.5.4 Applications;236
9.6;5.6 Electron Beam Lithography;239
9.6.1;5.6.1 Introduction;239
9.6.2;5.6.2 Experimental Set-Up;240
9.6.3;5.6.3 Classification of E-beam Lithography Systems;241
9.6.4;5.6.4 Working Principle;242
9.6.4.1;5.6.4.1 Beam Deflection and Blanking;242
9.6.4.2;5.6.4.2 Pattern Design and Electron Beam Resist;242
9.6.4.3;5.6.4.3 Pattern Processing;243
9.6.5;5.6.5 Applications;243
9.7;5.7 Electron Beam-Induced Deposition (EBID);245
9.7.1;5.7.1 Mechanism;245
9.7.2;5.7.2 Advantages/Disadvantages of EBID;246
9.7.3;5.7.3 Applications;246
9.8;5.8 Cathodoluminescence;247
9.8.1;5.8.1 Introduction;247
9.8.2;5.8.2 Instrumentation;248
9.8.3;5.8.3 Strengths and Limitations of SEM-CL;250
9.8.4;5.8.4 Applications;251
9.9;References;251
10;6: Characteristics of X-Rays;254
10.1;6.1 Atom Model;254
10.2;6.2 Production of X-Rays;255
10.2.1;6.2.1 Characteristic X-Rays;255
10.2.2;6.2.2 Continuous X-Rays;257
10.2.3;6.2.3 Duane-Hunt Limit;260
10.2.4;6.2.4 Kramer´s Law;260
10.2.5;6.2.5 Implication of Continuous X-Rays;261
10.3;6.3 Orbital Transitions;263
10.3.1;6.3.1 Nomenclature Used for Orbital Transition;263
10.3.2;6.3.2 Energy of Orbital Transition;263
10.3.3;6.3.3 Moseley´s Law;265
10.3.4;6.3.4 Critical Excitation Energy (Excitation Potential);265
10.3.5;6.3.5 Cross Section of Inner-Shell Ionization;267
10.3.6;6.3.6 Overvoltage;268
10.4;6.4 Properties of Emitted X-Rays;270
10.4.1;6.4.1 Excited X-Ray Lines;270
10.4.2;6.4.2 X-Ray Range;271
10.4.3;6.4.3 X-Ray Spatial Resolution;272
10.4.4;6.4.4 Depth Distribution Profile;274
10.4.5;6.4.5 Relationship Between Depth Distribution ?(?z) and Mass Depth (?z);275
10.4.6;6.4.6 X-Ray Absorption (Mass Absorption Coefficient);277
10.4.6.1;6.4.6.1 Mass Absorption Coefficient in a Single Element;280
10.4.6.2;6.4.6.2 Mass Absorption Coefficient in a Mixer of Elements;281
10.4.7;6.4.7 Secondary X-Ray Fluorescence;282
10.5;References;284
11;7: Microchemical Analysis in the SEM;286
11.1;7.1 Energy Dispersive X-Ray Spectroscopy (EDS);286
11.1.1;7.1.1 Working Principle;288
11.1.2;7.1.2 Advantages/Drawbacks of EDS Detector;293
11.2;7.2 Qualitative EDS Analysis;293
11.2.1;7.2.1 Selection of Beam Voltage and Current;294
11.2.2;7.2.2 Peak Acquisition;294
11.2.3;7.2.3 Peak Identification;294
11.2.4;7.2.4 Peak to Background Ratios;296
11.2.5;7.2.5 Background Correction;296
11.2.6;7.2.6 Duration of EDS Analysis;296
11.2.7;7.2.7 Dead Time;297
11.2.8;7.2.8 Resolution of EDS Detector;297
11.2.9;7.2.9 Overlapping Peaks;299
11.3;7.3 Artifacts in EDS Analysis;299
11.3.1;7.3.1 Peak Distortion;299
11.3.2;7.3.2 Peak Broadening;299
11.3.3;7.3.3 Escape Peaks;302
11.3.4;7.3.4 Sum Peaks;303
11.3.5;7.3.5 The Internal Fluorescence Peak;304
11.4;7.4 Display of EDS Information;304
11.4.1;7.4.1 EDS Spectra;305
11.4.2;7.4.2 X-Ray Maps;305
11.4.3;7.4.3 Line Scans;306
11.5;7.5 Quantitative EDS Analysis;308
11.5.1;7.5.1 Introduction;308
11.5.2;7.5.2 EDS with Standards;310
11.5.2.1;7.5.2.1 Castaing´s First Approximation;310
11.5.2.2;7.5.2.2 Deviation from Castaing´s First Approximation;311
11.5.2.3;7.5.2.3 Matrix Effects;312
11.5.2.3.1;Atomic Number Effect;312
11.5.2.3.2;Absorption Effect;314
11.5.2.3.3;Fluorescence Effect;314
11.5.2.4;7.5.2.4 ZAF Iterative Process;315
11.5.2.5;7.5.2.5 Phi-Rho-Z Correction Method;316
11.5.3;7.5.3 Examples of ZAF Correction Method;316
11.5.3.1;7.5.3.1 Stainless Steel;317
11.6;7.6 Standardless EDS Analysis;317
11.6.1;7.6.1 First Principles Standardless Analysis;319
11.6.2;7.6.2 Fitted Standards Standardless Analysis;319
11.7;7.7 Low-Voltage EDS;320
11.8;7.8 Minimum Detectability Limit (MDL);321
11.9;7.9 Wavelength Dispersive X-Ray Spectroscopy (WDS);321
11.9.1;7.9.1 Instrumentation;321
11.9.2;7.9.2 Working Principle;322
11.9.3;7.9.3 Analytical Crystals;325
11.9.4;7.9.4 Detection of X-Rays;325
11.9.5;7.9.5 Advantages/Drawbacks of WDS Technique;326
11.9.5.1;7.9.5.1 Advantages;326
11.9.5.2;7.9.5.2 Disadvantages;326
11.9.6;7.9.6 Qualitative WDS Analysis;327
11.10;References;327
12;8: Sample Preparation;329
12.1;8.1 Metals, Alloys, and Ceramics;329
12.1.1;8.1.1 Sampling;329
12.1.2;8.1.2 Sectioning;330
12.1.3;8.1.3 Cleaning;330
12.1.4;8.1.4 Embedding and Mounting;332
12.1.5;8.1.5 Grinding, Lapping, and Polishing;332
12.1.6;8.1.6 Impregnation;335
12.1.7;8.1.7 Etching;335
12.1.8;8.1.8 Fixing;336
12.1.9;8.1.9 Fracturing;336
12.1.10;8.1.10 Coating Process;338
12.1.10.1;8.1.10.1 Sputter Coating;338
12.1.10.1.1;Advantages;339
12.1.10.1.2;Limitations;340
12.1.10.2;8.1.10.2 Metal Coating by Vacuum Evaporation;340
12.1.10.2.1;Advantages;341
12.1.10.2.2;Disadvantages;341
12.1.10.3;8.1.10.3 Coating by Carbon Evaporation;341
12.1.10.4;8.1.10.4 Imaging of Coated Specimens;342
12.1.11;8.1.11 Marking Specimens;343
12.1.12;8.1.12 Specimen Handling and Storage;343
12.2;8.2 Geological Materials;344
12.2.1;8.2.1 Preliminary Preparation;344
12.2.2;8.2.2 Cleaning;344
12.2.3;8.2.3 Drying;345
12.2.4;8.2.4 Impregnation;345
12.2.5;8.2.5 Replicas and Casts;346
12.2.6;8.2.6 Rock Sample Cutting;346
12.2.7;8.2.7 Mounting the Sample into the SEM Holder;346
12.2.7.1;8.2.7.1 Using Stub;346
12.2.7.2;8.2.7.2 Embedding Media to the Sample;346
12.2.7.3;8.2.7.3 Grain Mounts;347
12.2.7.4;8.2.7.4 Mounting Standards;347
12.2.8;8.2.8 Polishing;347
12.2.9;8.2.9 Etching;348
12.2.10;8.2.10 Coating;348
12.3;8.3 Building Materials;349
12.3.1;8.3.1 Preparation of Cement Paste, Mortar, and Concrete Samples;349
12.3.1.1;8.3.1.1 Dry Potting;349
12.3.1.2;8.3.1.2 Wet Potting;349
12.3.2;8.3.2 Cutting and Grinding;350
12.3.3;8.3.3 Polishing;350
12.3.4;8.3.4 Impregnation Techniques;351
12.3.4.1;8.3.4.1 Epoxy Impregnation;351
12.3.4.2;8.3.4.2 Dye Impregnation Method;351
12.3.4.3;8.3.4.3 Impregnation by Wood´s Metal;351
12.3.4.4;8.3.4.4 High-Pressure Epoxy Impregnation Method;351
12.3.5;8.3.5 Drying the Specimen;352
12.3.6;8.3.6 Coating the Specimen;352
12.3.7;8.3.7 Cleaning the Surface of the Specimen;352
12.4;8.4 Polymers;352
12.4.1;8.4.1 Types of Polymers;353
12.4.1.1;8.4.1.1 Thermoplastics;353
12.4.1.2;8.4.1.2 Thermosets;354
12.4.1.3;8.4.1.3 Rubbers and Elastomers;354
12.4.2;8.4.2 Morphology of Polymers;354
12.4.2.1;8.4.2.1 Amorphous Polymers;354
12.4.2.2;8.4.2.2 Semicrystalline Polymers;355
12.4.3;8.4.3 Problems Associated with the SEM of Polymers;355
12.4.3.1;8.4.3.1 Radiation Sensitivity of Polymers;355
12.4.3.2;8.4.3.2 Low Contrast of Polymers;356
12.4.3.3;8.4.3.3 Charging;357
12.4.3.4;8.4.3.4 Degraded EDS or WDS Spectrum;357
12.4.4;8.4.4 General Aspects in Polymers Preparation for SEM;357
12.4.5;8.4.5 Sample Preparation Techniques for Polymers;358
12.4.5.1;8.4.5.1 Cutting and Sectioning;358
12.4.5.2;8.4.5.2 Microtomy of Polymers;358
12.4.5.3;8.4.5.3 Peel-Back Method;359
12.4.6;8.4.6 Devices Used in Microtomy;359
12.4.6.1;8.4.6.1 Microtome;359
12.4.6.2;8.4.6.2 Ultramicrotome;359
12.4.6.3;8.4.6.3 Cryo-microtome and Cryo-ultramicrotome;359
12.4.7;8.4.7 Sample Preparation Procedure for Polymers;360
12.4.7.1;8.4.7.1 Mounting of Polymer Samples;360
12.4.7.2;8.4.7.2 Grinding of Polymers;361
12.4.7.3;8.4.7.3 Polishing of Polymers;361
12.4.7.4;8.4.7.4 Etching of Polymers;362
12.4.7.4.1;Solvent and Chemical Etching;363
12.4.7.4.2;Acid Etching;363
12.4.7.4.3;Permanganate Etching;363
12.4.7.4.4;Plasma and Ion Etching;363
12.4.7.4.5;Focused Ion Beam Etching;363
12.4.7.4.6;Replication of Polymers;364
12.4.7.4.7;Staining of Polymers;365
12.4.7.4.8;Conductive Coatings;365
12.4.7.5;8.4.7.5 Cryogenic and Drying Methods;366
12.4.7.6;8.4.7.6 Simple Freezing Methods;366
12.4.7.7;8.4.7.7 Freeze-Drying;366
12.4.7.8;8.4.7.8 Critical Point Drying;367
12.4.7.9;8.4.7.9 Yielding and Fracture;367
12.5;8.5 Biological Materials;368
12.5.1;8.5.1 Fixation;369
12.5.1.1;8.5.1.1 Chemical Fixation;369
12.5.1.1.1;Formaldehyde (FA);370
12.5.1.1.2;Glutaraldehyde (GA);370
12.5.1.1.3;Osmium Tetroxide (OT);370
12.5.1.1.4;Protein Cross-linking Reagents;371
12.5.1.2;8.5.1.2 Physical Fixation;371
12.5.2;8.5.2 Examples of Biological Sample Preparation;371
12.5.2.1;8.5.2.1 Bone Tissue;371
12.5.2.2;8.5.2.2 Heart Tissue;372
12.5.2.3;8.5.2.3 Stem Cells;372
12.5.2.4;8.5.2.4 Bacteria;373
12.5.2.5;8.5.2.5 Insect;374
12.6;References;378
13;Questions/Answers;380
13.1;Chapter 1;380
13.2;Chapter 2;382
13.3;Chapter 3;388
13.4;Chapter 4;397
13.5;Chapter 5;400
13.6;Chapter 6;405
13.7;Chapter 7;408
13.8;Chapter 8;412
14;Index;416




