E-Book, Englisch, Band 2, 342 Seiten, eBook
Widmann / Mader / Friedrich Technology of Integrated Circuits
2000
ISBN: 978-3-662-04160-4
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark
E-Book, Englisch, Band 2, 342 Seiten, eBook
Reihe: Springer Series in Advanced Microelectronics
ISBN: 978-3-662-04160-4
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark
This is the first book to comprehensively record the authors’ authoritative knowledge and practical experience of IC manufacturing, including the tremendous developments of recent years. With its strong application orientation, this is a must-have book for professionals in semiconductor industries.
Zielgruppe
Research
Autoren/Hrsg.
Weitere Infos & Material
1 Introduction.- 2 Basic principles of integrated circuits technology.- 3 Film technology.- 4 Lithography.- 5 Etching technology.- 6 Doping technology.- 7 Cleaning technology.- 8 Process integration.- References.




