Zhu Vacuum Microelectronics

1. Auflage 2004
ISBN: 978-0-471-46409-9
Verlag: John Wiley & Sons
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 416 Seiten, E-Book

Expert coverage of vacuum microelectronics-principles, devices,and applications
The field of vacuum microelectronics has advanced so swiftlythat commercial devices are being fabricated, and applications arebeing developed in displays, wireless communications, spacecraft,and electronics for use in harsh environments. It is a rapidlyevolving, interdisciplinary field encompassing electricalengineering, materials science, vacuum engineering, and appliedphysics.
This book surveys the fundamentals, technology, and deviceapplications of this nascent field. Editor Wei Zhu brings togethersome of the world's foremost experts to provide comprehensive andin-depth coverage of the entire spectrum of vacuummicroelectronics. Topics include:
* Field emission theory
* Metal and silicon field emitter arrays
* Novel cold cathode materials
* Field emission flat panel displays
* Cold cathode microwave devices
Vacuum Microelectronics is intended forpractitioners in the display, microwave, telecommunications, andmicroelectronics industries and in government and universityresearch laboratories, as well as for graduate students majoring inelectrical engineering, materials science, and physics. It providescutting-edge, expert coverage of the subject and serves as both anintroductory text and a professional reference.

Autoren/Hrsg.

Zhu, Wei

Inhaltsverzeichnis

Preface ix
List of Contributors xiii
1. Historical Overview 1
Takao Utsumi
1.1 Introduction 1
1.2 Shoulders' Proposal 1
1.3 Groundbreaking Work 2
1.4 Invention of Spindt Cathode 4
1.5 Field Emitter Arrays 5
1.6 New Cathode Materials 6
1.7 Future 7
Dedication 9
References 9
2 Technological Overview 13
Gregory P. Kochanski, Wei Zhu, and Yehuda Goren
2.1 Introduction 13
2.2 Promise and Reality 14
2.3 Case Studies 15
2.4 Outlook 30
References 31
3 Theory of Field Emission 33
Kevin L. Jensen
3.1 Introduction 33
3.2 One-Dimensional Tunneling Theory: Metals 35
3.3 Emission from Multi-Dimensional Structures 69
3.4 Conclusion 97
Acknowledgments 98
References 98
4 Spindt Field Emitter Arrays 105
Charles A. (Capp) Spindt, Ivor Brodie, Christopher E. Holland and Paul R. Schwoebel
4.1 Introduction 105
4.2 A Brief History of the Spindt Cathode 106
4.3 Fabrication Technology 108
4.4 Performance 141
4.5 Applications and Ongoing Developments 179
4.6 Summary 181
Acknowledgments 181
References 182
5 Silicon Field Emitter Arrays 187
Jonathan Shaw and Junji Itoh
5.1 Introduction 187
5.2 Fabrication of Silicon FEAs 190
5.3 Free Electron Theory of Field Emission 199
5.4 Emission Characterization of Silicon FEAs 205
5.5 Local Circuit Elements 224
5.6 Summary 241
Dedication 242
References 242
6 Novel Cold Cathode Materials 247
Wei Zhu, Peter K. Baumann, and Christopher A. Bower
6.1 Introduction 247
6.2 Diamond Emitters 248
6.3 Carbon Nanotube Emitters 265
6.4 Other Cold Cathodes 274
6.5 Conclusion 280
References 280
7 Field Emission Flat Panel Displays 289
Heinz H. Busta
7.1 Introduction 289
7.2 Field Emission Displays 290
7.3 Other Display Technologies 334
7.4 Summary 341
Institutions Involved inFEDCommercialization 342
Acknowledgments 343
References 343
8 Cold Cathode Microwave Devices 349
R. Allen Murphy and Mary Anne Kodis
8.1 Introduction 349
8.2 Microwave Amplifiers 350
8.3 Field Emitter Arrays 355
8.4 Characteristics of FEA-Cathode Microwave Tubes 381
8.5 Future Work 385
References 386
Index 393

Über Autor(innen)

WEI ZHU received his PhD in solid state science from PennsylvaniaState University. He was a visiting assistant professor at NorthCarolina State University before he joined AT&T BellLaboratories (later Lucent Technologies Bell Laboratories) in 1993.He is currently a member of technical staff in the AppliedMaterials Research Department at Agere Systems, formerly themicroelectronics group of Lucent Technologies, where he specializesin carbon-based materials and applications. His interests includenovel cold cathode materials and devices, nanoscale materials andtechnology, MEMS, and optical waveguide materials and devices. Heholds more than thirty patents and has coauthored over fortypapers. He organized the first Materials Research Society symposiumon vacuum microelectronics in 1998. He is a member of the MaterialsResearch Society and the Optical Society of America.