Chui Microcantilevers for Atomic Force Microscope Data Storage

1999
ISBN: 978-1-4615-4983-3
Verlag: Springer US
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, Band 1, 148 Seiten, eBook

Reihe: Microsystems

describes a research collaboration between IBM Almaden and Stanford University in which a new mass data storage technology was evaluated. This technology is based on the use of heated cantilevers to form submicron indentations on a polycarbonate surface, and piezoresistive cantilevers to read those indentations.
describes how silicon micromachined cantilevers can be used for high-density topographic data storage on a simple substrate such as polycarbonate. The cantilevers can be made to incorporate resistive heaters (for thermal writing) or piezoresistive deflection sensors (for data readback).
The primary audience for is industrial and academic workers in the microelectromechanical systems (MEMS) area. It will also be of interest to researchers in the data storage industry who are investigating future storage technologies.

Zielgruppe

Research

Autoren/Hrsg.

Chui, Benjamin W.

Inhaltsverzeichnis

Editor's Preface. 1. Introduction. 2. Heater-Cantilevers for Writing: Design, Fabrication and Basic Characterization. 3. Heater-Cantilevers for Writing: Further Characterization, Modeling and Optimization. 4. Piezoresistive Cantilevers for Readback. 5. Dual-Axis Piezoresistive Cantilevers: Design, Fabrication and Characterization. 6. Dual-Axis Piezoresistive Cantilevers for Tracking: Applications. 7. Conclusion and Future Work. Appendix 1: Heater-Cantilever Fabrication Process. Appendix 2: Piezoresistive Cantilever Fabrication Process. Appendix 3: Dual-Axis Piezoresistive Cantilever Fabrication Process. Bibliography. Index.