E-Book, Englisch, 222 Seiten
Frühauf Shape and Functional Elements of the Bulk Silicon Microtechnique
1. Auflage 2005
ISBN: 978-3-540-26876-5
Verlag: Springer Berlin Heidelberg
Format: PDF
Kopierschutz: 1 - PDF Watermark
A Manual of Wet-Etched Silicon Structures
E-Book, Englisch, 222 Seiten
ISBN: 978-3-540-26876-5
Verlag: Springer Berlin Heidelberg
Format: PDF
Kopierschutz: 1 - PDF Watermark
This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.
Autoren/Hrsg.
Weitere Infos & Material
1;Preface;5
2;Table of Contents;6
3;Symbols;10
4;1 Introduction;12
5;2 Technological Basis of Bulk-Silicon- Microtechnique;15
5.1;2.1 The silicon wafer as a basis material of microtechnique;15
5.2;2.2 Technological processes;16
6;3 Orientation Dependent Etching of Silicon;27
6.1;3.1 Fundamental principles of the generation of shapes;27
6.2;3.2 Chemistry and techniques of wet silicon etching;47
6.3;3.3 Etch mask design and simulation of silicon etching;56
6.4;3.4 Basic processes of the bulk-silicon-microtechnique;62
7;4 General Overview of the Shape- and Functional Elements and the Procedure of their Design;80
7.1;4.1 Survey and methodical procedure;80
7.2;4.2 Guide for the design procedure;82
7.3;4.3 Legend of the sketches;82
8;5 Simple Shape Elements;84
8.1;5.1 Definitions of shapes by the combination of sidewalls;84
8.2;5.2 Qualities of etch ground and sidewall-faces and of the edges between them;95
8.3;5.3 Shape elements made by one-step etch processes;103
8.4;5.4 Shape elements made by two-step etch processes;123
9;6 Elements for Mechanical Applications;136
9.1;6.1 Spring elements;136
9.2;6.2 Levers / Spring hinges;152
9.3;6.3 Sliding guides;155
9.4;6.4 Bearings;158
10;7 Elements for Fluidic Applications;167
10.1;7.1 Channels;167
10.2;7.2 Alterations of cross section of channels;170
10.3;7.3 Elbows;171
10.4;7.4 Branchings (Mixers);174
10.5;7.5 Caverns (Cavities);177
10.6;7.6 Nozzles;179
11;8 Elements for Optical Applications;185
11.1;8.1 Grooves for fibre positioning;185
11.2;8.2 Micro mirrors;188
11.3;8.3 Beam Splitters;193
11.4;8.4 Concave Micro Mirrors;196
11.5;8.5 Gratings;197
11.6;8.6 Infrared Prisms;201
12;Appendix;207
12.1;Physical Properties of Silicon;208
13;Index;224
