Buch, Englisch, 222 Seiten, Format (B × H): 155 mm x 235 mm, Gewicht: 1140 g
A Manual of Wet-Etched Silicon Structures
Buch, Englisch, 222 Seiten, Format (B × H): 155 mm x 235 mm, Gewicht: 1140 g
ISBN: 978-3-540-22109-8
Verlag: Springer
The idea for this manual was created by the author and Birgit Hannemann (now Professor at the University of Applied Sciences, Bremen, Germany) as an internal catalogue of results of several years of investigations at the Chemnitz University of Technology, Germany. At this base supplying investigations and the elabo- tion of the manuscript were supported by the Stiftung Industrieforschung, Bonn, Germany. In the course of this the coworkers of the author Eva Gärtner, Steffi Krönert and Cornelia Kowol were directly involved. All the SEM pictures result from preparations performed at the Centre of - crotechnologies at the Chemnitz University of Technology (Head: Prof. Thomas Gessner). The author and his coworkers wish to express their thanks to Wolfgang Bräuer (mask design), Norbert Zichner (processes), Iris Höbelt (SEM pictures) and the student Karin Preißler (manuscript layout support). In particular thanks are due to the Stiftung Industrieforschung for the financial support and to the Springer V- lag for the edition of this manual.
Zielgruppe
Professional/practitioner
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Keramik, Glas, Sonstige Werkstoffe
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikroprozessoren
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik
- Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Verfahrenstechnik, Chemieingenieurwesen
Weitere Infos & Material
Technological Basis of Bulk-Silicon-Microtechnique.- Orientation Dependent Etching of Silicon.- General Overview of the Shape- and Functional Elements and the Procedure of their Design.- Simple Shape Elements.- Elements for Mechanical Applications.- Elements for Fluidic Applications.- Elements for Optical Applications.
