Gronheid / Nealey Directed Self-assembly of Block Co-polymers for Nano-manufacturing

1. Auflage 2015
ISBN: 978-0-08-100261-2
Verlag: Morgan Kaufmann
Format: EPUB
Kopierschutz: 6 - ePub Watermark

E-Book, Englisch, 328 Seiten, Format (B × H): 152 mm x 229 mm

Reihe: Woodhead Publishing Series in Electronic and Optical Materials

The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology.

Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques.



- Authoritative outlining of theoretical principles and modeling techniques to give a thorough introdution to the topic
- Discusses a broad range of practical applications for directed self-assembly in nano-manufacturing
- Highlights the importance of this technology to both the present and future of nano-manufacturing by exploring its potential use in a range of fields

Autoren/Hrsg.

Gronheid, Roel

Nealey, Paul

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Biomaterialien, Nanomaterialien, Kohlenstoff
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Polymerwerkstoffe
• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Technologie der Kunststoffe und Polymere
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien

Inhaltsverzeichnis

Part 1 Physics and Chemistry of block copolymer (BCP) materials

1 Physics of block copolymers from bulk to thin films 2 RAFT synthesis of block copolymers and their self-assembly properties 3 Thermal and solvent annealing of block copolymers films 4 Field-theoretic simulations and self-consistent field theory (SCFT) simulations for studying block copolymer assembly

Part 2 Templates and patterning for directed self-assembly

5 Directed self-oriented self-assembly of block copolymers using topographical surfaces 6 Directed self-oriented self-assembly of block copolymers using chemically modified surfaces 7 Lin Edge Roughness and Dimensional Control in directed self-assembly  8 Soft and hard x-ray scattering to characterize the pattern shape in directed self-assembly of block co-polymers 9 Driven assembly at the nanoscale and its application to nanofabrication

Part 3 Application of directed self-assembly in nano-manufacturing 10 Directed self-assembly for basic logic circuit design 11 The inverse directed self-assembly problem 12 Design decomposition in templated directed self-assembly 13 Modeling and analysis of large scale, templated self-assembly manufacturing techniques

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