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Buch, Englisch, 328 Seiten, Format (B × H): 152 mm x 231 mm, Gewicht: 699 g
Buch, Englisch, 328 Seiten, Format (B × H): 152 mm x 231 mm, Gewicht: 699 g
ISBN: 978-0-08-100250-6
Verlag: Elsevier Science
The directed self-assembly (DSA) method of patterning for microelectronics uses polymer phase-separation to generate features of less than 20nm, with the positions of self-assembling materials externally guided into the desired pattern. Directed self-assembly of Block Co-polymers for Nano-manufacturing reviews the design, production, applications and future developments needed to facilitate the widescale adoption of this promising technology.
Beginning with a solid overview of the physics and chemistry of block copolymer (BCP) materials, Part 1 covers the synthesis of new materials and new processing methods for DSA. Part 2 then goes on to outline the key modelling and characterization principles of DSA, reviewing templates and patterning using topographical and chemically modified surfaces, line edge roughness and dimensional control, x-ray scattering for characterization, and nanoscale driven assembly. Finally, Part 3 discusses application areas and related issues for DSA in nano-manufacturing, including for basic logic circuit design, the inverse DSA problem, design decomposition and the modelling and analysis of large scale, template self-assembly manufacturing techniques.
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik
- Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Technologie der Kunststoffe und Polymere
- Technische Wissenschaften Technik Allgemein Nanotechnologie
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Polymerwerkstoffe
Weitere Infos & Material
Part One: Physics and chemistry of block copolymer (BCP) materials
1: Physics of block copolymers from bulk to thin films
2: RAFT synthesis of block copolymers and their self-assembly properties
3: Thermal and solvent annealing of block copolymer films
4: Field-theoretic simulations and self-consistent field theory for studying block copolymer directed self-assembly
Part Two: Templates and patterning for directed self-assembly
5: Directed self-oriented self-assembly of block copolymers using topographical surfaces
6: Directed self-oriented self-assembly of block copolymers using chemically modified surfaces
7: X-ray characterization of directed self-assembly block copolymers
8: Self-assembly of block copolymers by graphoepitaxy
Part Three: Application of directed self-assembly in nanomanufacturing
9: The inverse directed self-assembly problem
10: Directed self-assembly guiding template design for contact hole patterning
11: Modelling and analysis of large-scale, template self-assembly manufacturing techniques