Liu Photonic MEMS Devices

Design, Fabrication and Control
Erscheinungsjahr 2010
ISBN: 978-1-4200-4571-0
Verlag: Taylor & Francis
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 502 Seiten

Reihe: Optical Science and Engineering

Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today’s researchers are in need of a reference that goes beyond to include all aspects of engineering innovation. An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes. With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next-step in integrating photonic MEMS devices into commercial products and technology.

Zielgruppe

Optical and mechanical engineers who are familiar with classical micro-optics and photonics engineering; graduate students in optical and photonic MEMS.

Autoren/Hrsg.

Liu, Ai-Qun

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik

Inhaltsverzeichnis

MEMS Optical Switches and Systems
J. Li and A. Q. Liu
Design of MEMS Optical Switches
J. Li and A. Q. Liu
MEMS Thermo-Optic Switches
J. Li and T. Zhong
PHC Microresonators Dynamic Modulation Devices
S. T. Hwee Gee and A.Q. Liu
MEMS Variable Optical Attenuators
X. Zhang, H. Cai, and A.Q. Liu
MEMS Discretely Tunable Lasers
X. Zhang and H. Cai
MEMS Continuously Tunable Lasers
X. Zhang and A. Q. Liu
MEMS Injection-Locked Lasers
X. Zhang and A. Q. Liu
Deep Etching Fabrication Process
J. Li and A. Q. Liu
Deep Submicron Photonic Bandgap Crystal Fabrication Processes
S. H. G. Teo and A. Q. Liu
Control Strategies for Electrostatic MEMS Devices
B. Borovic and F. L. Lewis
Control of Optical Devices
B. Borovic and F. L. Lewis