Piezoresistor Design and Applications

2013
ISBN: 978-1-4614-8516-2
Verlag: Springer

Buch, Englisch, 245 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 5148 g

Reihe: Microsystems and Nanosystems

Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications.  Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The  text concludes with an up-to-date discussion of the need for integrated MEMS  design and opportunities to leverage new materials, processes and MEMS technology. 

Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.

Zielgruppe

Research

Autoren/Hrsg.

Pruitt, Beth L.

Doll, Joseph C.

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Sensorik
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise

Inhaltsverzeichnis

Introduction.- Piezoresistance fundamentals.- Sensitivity, noise and resolution.- Fabrication and process modeling.- Temperature effects.- Design optimization.- Alternative materials and transduction methods.

Über Autor(innen)

Beth Pruitt is a young and dynamic up and coming professor and the winner of an NSF career award for her recent research work. She’s now focusing piezoresistors and has observed that even though they comprise a large share of MEMS product market, there’s a dearth of material available on how to design and successfully produce them.  The goal of this book is to produce a practical guide to piezoresistor design using specific examples and case studies from Professor Pruitt’s recent research efforts.Joey Doll is a MEMS Development Engineer at SiTime.