Piezoresistor Design and Applications

Softcover Nachdruck of the original 1. Auflage 2013
ISBN: 978-1-4939-5554-1
Verlag: Springer

Buch, Englisch, 245 Seiten, Previously published in hardcover, Format (B × H): 155 mm x 235 mm, Gewicht: 3985 g

Reihe: Microsystems and Nanosystems

Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications.  Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The  text concludes with an up-to-date discussion of the need for integrated MEMS  design and opportunities to leverage new materials, processes and MEMS technology. 

Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.

Zielgruppe

Research

Autoren/Hrsg.

Pruitt, Beth L.

Doll, Joseph C.

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Sensorik

Inhaltsverzeichnis

Introduction.- Piezoresistance fundamentals.- Sensitivity, noise and resolution.- Fabrication and process modeling.- Temperature effects.- Design optimization.- Alternative materials and transduction methods.