Cheng Pose-varied Multi-axis Optical Finishing Systems

Theory and Process Validation
1. Auflage 2014
ISBN: 978-3-662-44182-4
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 162 Seiten

This book focuses on advanced optical finishing techniques and design for high-performance manufacturing systems. It provides numerous detailed examples of how advanced automation techniques have been applied to optical fabrication processes. The simulations, removal rate and accurate experimental results offer useful resources for engineering practice. Researchers, engineers and graduate students working in optical engineering and precision manufacture engineering will benefit from this book.

Autoren/Hrsg.

Cheng, Haobo

Inhaltsverzeichnis

1;Preface;5
2;Acknowledgments;6
3;Contents;7
4;1 Modeling on the Coverage of Free-Form Surfaces;10
4.1;Abstract;10
4.2;1.1 Questions for the Mapping of Free-Form Surfaces;10
4.3;1.2 Short Segments Generation;13
4.4;1.3 Modeling in Parallelogram Regions;15
4.5;1.4 Mapping Coverage of 3D Surfaces;18
4.5.1;1.4.1 Scanning the u-Strips;19
4.5.2;1.4.2 Partitioning;20
4.5.3;1.4.3 Simulations;21
4.6;1.5 Multiple Diagonal Segments;23
4.6.1;1.5.1 A Row of Parallelograms;24
4.6.2;1.5.2 Path with Multiple Diagonal Segments;26
4.6.3;1.5.3 Simulations;28
4.7;1.6 Process Validation;32
4.8;References;34
5;2 Define and Synthesis on Orbit Diversity;36
5.1;Abstract;36
5.2;2.1 Basic Model Along Orbit;36
5.3;2.2 Linear Orbit Features;40
5.3.1;2.2.1 Transformation Model of Gaussian Function;40
5.3.2;2.2.2 The Processing Steps with Multiplex Orbit;45
5.4;2.3 Curve Orbit Features;46
5.4.1;2.3.1 Effects of Curvatures;47
5.4.2;2.3.2 Effects of Corners with Different Angles;50
5.5;2.4 Combined Effect;53
5.5.1;2.4.1 Spiral Orbit;54
5.5.2;2.4.2 Raster Orbit;56
5.6;2.5 Process Validation;57
5.6.1;2.5.1 Spiral Orbit Finishing;57
5.6.2;2.5.2 Optimized Spiral Orbit;57
5.6.3;2.5.3 Raster Orbit Finishing;64
5.6.4;2.5.4 Optimized Raster Orbit;64
5.7;References;71
6;3 Conquering the Dynamic Limitation of Velocity;73
6.1;Abstract;73
6.2;3.1 Velocity Analysis;73
6.2.1;3.1.1 Analysis of Velocity and Position;75
6.2.2;3.1.2 Velocity Checking and Smoothing;77
6.3;3.2 Concept of Velocity-Variant Regime;79
6.3.1;3.2.1 Velocity-Variant Regime and Conflicts Between Convergence Rate and Efficiency;79
6.4;3.3 Models for Suppressing Velocity Limitation;82
6.4.1;3.3.1 Adding a Fictitious Removal Layer;82
6.4.2;3.3.2 Reducing the Removal Rate of TIFs;82
6.4.3;3.3.3 Traversing Nonuniform Orbits;83
6.5;3.4 The Controllable and Time-Variant TIFs Finishing Regime;84
6.5.1;3.4.1 The Construction of CTVT Regime;84
6.5.2;3.4.2 The Comparisons;87
6.6;3.5 Process Validation;88
6.6.1;3.5.1 Without CTVT Regime;88
6.6.2;3.5.2 With CTVT Regime;89
6.6.3;3.5.3 With CTVT and Larger Removal Rate;90
6.7;References;91
7;4 Prediction on Dwell Effects and Nonlinear Pressure Distribution;93
7.1;Abstract;93
7.2;4.1 Analysis of Nonuniform Dwell;93
7.2.1;4.1.1 Material Removal Profile;95
7.2.2;4.1.2 Discrepancy in Removal Near the Edge;96
7.2.3;4.1.3 Simulation of Edge Rectification;98
7.2.3.1;4.1.3.1 Nonoverlapping Dwells;99
7.2.3.2;4.1.3.2 Half-Overlapping Dwells;101
7.2.3.3;4.1.3.3 Two-Third Overlapping Dwells;103
7.2.3.4;4.1.3.4 Beyond Two-Third Overlapping Dwells;105
7.2.3.5;4.1.3.5 Error Remaining;106
7.3;4.2 Weaken of Edge Dwell Effects;107
7.3.1;4.2.1 Situation of Different Tools;108
7.3.2;4.2.2 Orbits Extension;109
7.3.3;4.2.3 Surface Error Matrix Extension;110
7.3.4;4.2.4 Extension Algorithms;110
7.3.4.1;4.2.4.1 Setting Zero;110
7.3.4.2;4.2.4.2 Gaussion Extension Algorithms;111
7.3.4.3;4.2.4.3 Neighbor Average Extension Algorithms;112
7.3.4.4;4.2.4.4 Gerchberg-Pupil Extension Algorithms;113
7.4;4.3 Effects of Nonlinear Pressure Related Distribution;115
7.4.1;4.3.1 Tool Influence Functions (TIFs);116
7.4.2;4.3.2 Modified Pressure Distribution Model;117
7.4.3;4.3.3 Modified Emulational TIFs Model;119
7.4.4;4.3.4 Reverse-Calculation of Material Removal Rate;121
7.5;4.4 Process Validation;121
7.5.1;4.4.1 Validating the Edge Correction;121
7.5.2;4.4.2 Validating the Edge Extension;124
7.5.3;4.4.3 Validating the Removal Shape of e-TIFs;128
7.5.4;4.4.4 Validating the Effectiveness of the Predicting Model;131
7.6;References;132
8;5 Correction on Data Matching and Remounting Errors;135
8.1;Abstract;135
8.2;5.1 Aspheric Calculation and Nonlinear Mapping Correction;135
8.2.1;5.1.1 Description of an Off-Axis Aspheric Surface;136
8.2.2;5.1.2 Non-negative Minimized Removal Criterion;137
8.2.3;5.1.3 The Estimate of Radius of Curvature and Conic Constant;139
8.2.4;5.1.4 Design on the Interferometric Testing System;140
8.2.5;5.1.5 Calculation on the Distorted Surface Error;142
8.2.6;5.1.6 Multiregion Distribution Strategy;145
8.2.7;5.1.7 Process Validation;148
8.3;5.2 Remounting Errors Correction;152
8.3.1;5.2.1 Effect of Dismatched Coordinate Systems;152
8.3.2;5.2.2 Strategy for Reducing Remounting Errors;154
8.3.2.1;5.2.2.1 Mathematical Model of Remounting Error;154
8.3.2.2;5.2.2.2 Mask for Providing Reference Points;155
8.3.3;5.2.3 Process Validation;157
8.4;References;161