Smart Sensors and MEMS

Proceedings of the NATO Adavanced Study Institute on Smart Sensors and MEMS, Povoa de Varzim, Portugal 8 - 19 September 2003
2004
ISBN: 978-1-4020-2928-8
Verlag: Springer Netherlands

Buch, Englisch, Band 181, 480 Seiten, Paperback, Format (B × H): 155 mm x 233 mm, Gewicht: 1530 g

Reihe: NATO Science Series II: Mathematics, Physics and Chemistry

The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book.

It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS.

The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.

Zielgruppe

Professional/practitioner

Autoren/Hrsg.

Gomes, Maria T. S. R.

Yurish, Sergey Y.

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Sensorik
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise
• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Fertigungsverfahren der Präzisionsgeräte
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikroprozessoren

Inhaltsverzeichnis

Smart Sensors for Electrical and Non-electrical, Physical and Chemical Variables: State-of-the-art.- Novel Conversion Methods for Self-Adaptive Smart Sensors.- Resonant Piezoelectric Devices as Physical and Biochemical Sensors.- Acoustic-Wave Piezoelectric and Pyroelectric Sensors Based on PZT Thick Films.- Wireless Passive SAW Identification Marks and Sensors.- Precise Vectorial Magnetic Sensors.- Micro-Hall Magnetic Sensors: Physics, Technologies and Applications.- Modern Silicon-based MEMS Technology.- Porous Silicon: Technology and Applications for Micromachining and MEMS.- Thermal Design of Microelectronics Systems.- Chemical and Biological Sensors Based on Microcantilevers.- Uncooled Infrared MEMS Detectors.- Bulk Acoustic Wave Sensors in Chemical Analysis.- Electronic Biosensors Based on Biomaterial-Nanoparticle Hybrid Systems.