Quinten A Practical Guide to Surface Metrology

1. Auflage 2020
ISBN: 978-3-030-29454-0
Verlag: Springer International Publishing
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 247 Seiten

Reihe: Springer Series in Measurement Science and Technology

This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the user to select the best approach in a given context. Most methods in surface metrology are based upon the interaction of light or electromagnetic radiation (UV, NIR, IR), and different optical effects are utilized to get a certain optical response from the surface; some of them record only the intensity reflected or scattered by the surface, others use interference of EM waves to obtain a characteristic response from the surface. The book covers techniques ranging from microscopy (including confocal, SNOM and digital holographic microscopy) through interferometry (including white light, multi-wavelength, grazing incidence and shearing) to spectral reflectometry and ellipsometry. The non-optical methods comprise tactile methods (stylus tip, AFM) as well as capacitive and inductive methods (capacitive sensors, eddy current sensors).The book provides: Overview of the working principlesDescription of advantages and disadvantagesCurrently achievable numbers for resolutions, repeatability, and reproducibilityExamples of real-world applications A final chapter discusses examples where the combination of different surface metrology techniques in a multi-sensor system can   reasonably contribute to a better understanding of surface properties as well as a faster characterization of surfaces in industrial    applications. The book is aimed at scientists and engineers who use such methods for the measurement and characterization of
surfaces across a wide range of fields and industries, including electronics, energy, automotive and medical engineering.
 

Dr. habil. Michael Quinten is a senior staff member at FRT GmbH in Bergisch Gladbach, working as Head of R&D Sensors and Head of Technical Coordination. Previously he was project manager in development and product manager at the STEAG ETA-Optik GmbH in Heinsberg, Product Manager for 'Color and Coatings' (Color measurement, coating thickness measurement and simulation), 'Spectrometry UV-VIS-NIR' and 'Integrated Optics'. He has been Research assistant at the Universities of Chemnitz TU, University of Saarland, Ruhr-University Bochum, RWTH Aachen and visiting professor at the Karl-Franzens-University Graz.

Autoren/Hrsg.

Quinten, Michael

Inhaltsverzeichnis

1;Preface;7
2;Contents;9
3;About the Author;12
4;List of Figures;13
5;List of Tables;22
6;Chapter 1: Introduction to Surfaces and Surface Metrology;23
6.1;1.1 Microscopic View on a Surface;25
6.2;1.2 Macroscopic View on a Surface;27
6.3;1.3 Measurement and Validation;30
6.3.1;1.3.1 Profile Measurement;38
6.3.2;1.3.2 Areal Measurement;49
6.3.3;1.3.3 Measurement Modules;53
6.3.3.1;1.3.3.1 Stages;54
6.3.3.2;1.3.3.2 Piezoelectrical and Inductive Transducers;56
6.3.3.3;1.3.3.3 Optical Detectors;56
6.3.3.4;1.3.3.4 Light Sources;60
6.3.4;1.3.4 The Way to Reliable Surface Data;61
6.4;References;63
7;Chapter 2: Tactile Surface Metrology;64
7.1;2.1 Tactile Surface Profiling;64
7.2;2.2 Atomic Force Microscopy;68
7.3;References;75
8;Chapter 3: Capacitive and Inductive Surface Metrology;77
8.1;3.1 Capacitive Surface Profiling;77
8.2;3.2 Surface Profiling with Eddy Currents;82
8.3;References;85
9;Chapter 4: Optical Surface Metrology - Physical Basics;86
9.1;4.1 Electromagnetic Waves;86
9.2;4.2 Huygens-Fresnel Principle of Wave Propagation;89
9.3;4.3 Polarization;90
9.4;4.4 Interference;91
9.5;4.5 Coherence;93
9.6;4.6 Dielectric Function and Refractive Index;94
9.7;4.7 Reflection and Refraction;100
9.8;4.8 Dispersion Effects;103
9.9;4.9 Diffraction;105
9.10;4.10 Scattering;107
9.11;References;111
10;Chapter 5: Optical Surface Metrology: Methods;113
10.1;5.1 Chromatic Confocal Surface Profiling;113
10.2;5.2 Surface Profiling with an Autofocus Sensor;120
10.3;5.3 Light Sectional Methods;122
10.3.1;5.3.1 Laser Point Triangulator;122
10.3.2;5.3.2 Line Projection;123
10.3.3;5.3.3 Fringe Projection;124
10.4;5.4 Microscopy Methods;126
10.4.1;5.4.1 Classical Microscopy;127
10.4.2;5.4.2 Confocal Microscopy;133
10.4.3;5.4.3 Focal Depth Variation;142
10.4.4;5.4.4 Scanning Near-Field Optical Microscopy;145
10.5;5.5 Interferometric Methods;146
10.5.1;5.5.1 Interferometric Form Inspection;150
10.5.1.1;5.5.1.1 Form Inspection of Planar Surfaces;150
10.5.1.2;5.5.1.2 Form Inspection of Spherical, Aspherical and Freeform Surfaces;151
10.5.2;5.5.2 Tilted Wave Interferometry;152
10.5.3;5.5.3 White Light Interferometry;154
10.5.4;5.5.4 Wavelength Scanning Interferometry;163
10.5.5;5.5.5 Multi-Wavelength Interferometry;165
10.5.6;5.5.6 Grazing Incidence Interferometry;168
10.5.7;5.5.7 Frequency Scanning Interferometry;171
10.5.8;5.5.8 Digital Holographic Microscopy;173
10.5.9;5.5.9 Conoscopy;177
10.6;5.6 Wave Front Sensing (Shack-Hartmann);178
10.7;5.7 Deflectometry;181
10.8;5.8 Makyoh Topography Sensor;183
10.9;5.9 Surface Profiling Using Elastic Light Scattering;185
10.9.1;5.9.1 Total Integrated Scattering (TIS);186
10.9.2;5.9.2 Angular Resolved Scattering (ARS);187
10.9.3;5.9.3 Speckle Based Roughness Determination;191
10.10;5.10 Spectral Analysis and Characterization;194
10.10.1;5.10.1 Reflectometry;195
10.10.1.1;5.10.1.1 Optical Film Thickness Determination;197
10.10.1.2;5.10.1.2 Critical Dimensions Determination;204
10.10.2;5.10.2 Spectroscopic Ellipsometry;206
10.11;References;208
11;Chapter 6: Imaging Methods;217
11.1;6.1 Industrial Image Processing;217
11.1.1;6.1.1 Illumination;219
11.1.2;6.1.2 Camera;219
11.1.3;6.1.3 Image Processing Hardware;220
11.1.4;6.1.4 Digital Image Processing Software;220
11.1.5;6.1.5 Mechanics;221
11.2;6.2 Shape from Shading;221
11.3;6.3 Hyperspectral Imaging;223
11.4;6.4 Scanning Electron Microscopy;226
11.5;6.5 Optical Coherence Tomography;229
11.6;6.6 Terahertz Spectroscopy;231
11.7;References;234
12;Chapter 7: Multisensor - Systems - A Versatile Approach to Surface Metrology;236
13;Appendix - Numerics with Complex Numbers;240
13.1;Addition;240
13.2;Multiplication;241
13.3;Modulus;241
13.4;Division;242
13.5;Power n;242
13.6;Logarithm;243
13.7;Exponentiation;243
13.8;Trigonometric Functions;243
14;Index;244