Schaaf Laser Processing of Materials

Fundamentals, Applications and Developments
1. Auflage 2010
ISBN: 978-3-642-13281-0
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, Band 139, 234 Seiten

Reihe: Springer Series in Materials Science

Laser materials processing has made tremendous progress and is now at the forefront of industrial and medical applications. The book describes recent advances in smart and nanoscaled materials going well beyond the traditional cutting and welding applications. As no analytical methods are described the examples are really going into the details of what nowadways is possible by employing lasers for sophisticated materials processing giving rise to achievements not possible by conventional materials processing.

Autoren/Hrsg.

Schaaf, Peter

Inhaltsverzeichnis

1;Preface;6
2;Contents;8
3;Contributors;14
4;Chapter 1: Introduction;16
4.1;References;18
5;Chapter 2: Basics of Lasers and Laser Optics;19
5.1;2.1 Introduction;19
5.2;2.2 Optical Processes;19
5.3;2.3 Time Dependence;22
5.3.1;2.3.1 Q-Switching;22
5.3.2;2.3.2 Mode-Locking;23
5.3.3;2.3.3 Ultrashort Pulse Generation;23
5.3.4;2.3.4 Harmonic Generation;23
5.4;2.4 Free-Electron Lasers;24
5.5;2.5 Laser Optics;26
5.5.1;2.5.1 Optical Propagation;27
5.5.2;2.5.2 Sizing Optical Elements and Other Tricks of the Trade;28
5.5.3;2.5.3 Fiber Optics;28
5.5.4;2.5.4 Managing Diffraction;29
5.5.5;2.5.5 The Aspheric Lens Beamshaper;29
5.5.6;2.5.6 Holographic Optical Elements;30
5.5.7;2.5.7 Laser Damage;31
5.5.8;2.5.8 Optical Modeling Software;33
5.6;2.6 Conclusions;33
5.7;References;33
6;Chapter 3: Fundamentals of Laser-Material Interactions;35
6.1;3.1 Basic Considerations;35
6.2;3.2 Laser;36
6.3;3.3 Heat in Solids: Electronic and Lattice Dynamics;37
6.4;3.4 Laser-Material Interactions;41
6.4.1;3.4.1 Single Photon and Multi-Photon Processes;41
6.4.2;3.4.2 Laser Reflection and Absorption;42
6.4.3;3.4.3 Temperature Profiles;45
6.5;3.5 Phenomena Occurring on the Target Surface;49
6.5.1;3.5.1 Vaporization;49
6.5.2;3.5.2 Recondensation;50
6.5.3;3.5.3 Plasma Formation;51
6.5.4;3.5.4 Laser Supported Absorption Waves;53
6.6;3.6 Material Transport Phenomena;56
6.7;3.7 Conclusions;58
6.8;References;58
7;Chapter 4: Laser–Plasma Interactions;62
7.1;4.1 Introduction;62
7.2;4.2 Fundamentals of Laser–Plasma Interaction;63
7.3;4.3 Processes in Nanosecond Laser–Plasma Interactions;68
7.3.1;4.3.1 Laser-Induced Gas Breakdown;68
7.3.2;4.3.2 Plasma Shielding During Laser Material Processing;72
7.3.2.1;4.3.2.1 Target Vaporization;72
7.3.2.2;4.3.2.2 Plasma Ignition in the Vapor;73
7.3.2.3;4.3.2.3 Plasma Ignition in the Ambient Gas;74
7.3.2.4;4.3.2.4 The Role of Surface Defects;74
7.3.3;4.3.3 Laser-Supported Absorption Waves;76
7.3.3.1;4.3.3.1 Definition and Modeling;76
7.3.3.2;4.3.3.2 Propagation Modes;78
7.3.4;4.3.4 Plasma Shutter for Optical Limitation;79
7.3.4.1;4.3.4.1 Mechanisms and Characteristic Times;79
7.3.4.2;4.3.4.2 Plasma Shutter Applications;81
7.4;4.4 Plasma Interactions with Femtosecond Laser Pulses;82
7.4.1;4.4.1 Laser Beam Filamentation;82
7.4.1.1;4.4.1.1 Mechanisms and Processes;82
7.4.1.2;4.4.1.2 Applications of Laser Beam Filamentation;85
7.4.2;4.4.2 Generation of XUV Radiation by Laser Plasma;88
7.4.2.1;4.4.2.1 Pulsed XUV Radiation Sources: A Review;88
7.4.2.2;4.4.2.2 Laser Plasma X-Ray Sources;90
7.4.2.3;4.4.2.3 High-Order Harmonic Generation;90
7.4.3;4.4.3 Plasma Mirror;93
7.4.3.1;4.4.3.1 Short Laser Pulse ``cleaning' by Plasma Mirrors;93
7.4.3.2;4.4.3.2 Harmonic Generation by Plasma Mirror;95
7.5;4.5 Conclusion;96
7.6;References;97
8;Chapter 5: Laser Ablation and Thin Film Deposition;102
8.1;5.1 Pulsed Laser Ablation;102
8.2;5.2 Lasers Used for Laser Ablation;104
8.3;5.3 Initial Ablation Processes and Plume Formation;105
8.3.1;5.3.1 Femtosecond Laser Irradiation;106
8.3.2;5.3.2 Nanosecond Laser Irradiation;106
8.4;5.4 Plume Expansion;107
8.4.1;5.4.1 Plume Expansion in Vacuum;107
8.4.2;5.4.2 Plume Expansion into a Background Gas;107
8.4.3;5.4.3 Imaging;108
8.4.4;5.4.4 Kinetic Energy of Plume Species;110
8.4.5;5.4.5 Thin Film Growth;111
8.5;5.5 Laser Ablation of Polymers;117
8.5.1;5.5.1 Ablation Mechanism;118
8.5.2;5.5.2 Polymer Film Ablation;119
8.5.3;5.5.3 Film Pattern Transfer;120
8.6;5.6 Conclusions;122
8.7;References;122
9;Chapter 6: Processing with Ultrashort Laser Pulses;126
9.1;6.1 Introduction and General Considerations;126
9.2;6.2 Laser-Material Coupling;127
9.2.1;6.2.1 Nonlinear Absorption;128
9.2.2;6.2.2 Hot Electron Generation;129
9.2.3;6.2.3 Incubation;129
9.2.4;6.2.4 Resolution Below the Diffraction Limit;130
9.3;6.3 Dissipation Dynamics;131
9.3.1;6.3.1 Dissipation Channels;131
9.3.2;6.3.2 Transient Material Modification;131
9.4;6.4 Desorption/Ablation;133
9.4.1;6.4.1 Concept;133
9.4.2;6.4.2 Applications;133
9.5;6.5 3-D Bulk Modifications, Waveguide Writing;135
9.5.1;6.5.1 Bulk Structuring, Waveguide Writing;136
9.5.2;6.5.2 Multiphoton Polymerization;136
9.6;6.6 Phase Transformation, Laser Annealing;137
9.7;6.7 Medical Applications;137
9.8;6.8 Nanostructures and Nanoparticles;137
9.9;6.9 Conclusions;139
9.10;References;139
10;Chapter 7: Creating Nanostructures with Lasers;143
10.1;7.1 Introduction;144
10.2;7.2 Fundamentals;145
10.2.1;7.2.1 Plasma–Gas Interaction at Increasing Gas Pressure in ns PLD: Experiments and Modeling;145
10.2.2;7.2.2 Nanoparticle Synthesis;152
10.2.3;7.2.3 Controlled Deposition of 2D Nanoparticle Arrays: Self-Organization, Surface Topography, and Optical Properties;155
10.3;7.3 NP Formation in Femtosecond PLD: Experimental Results and Mechanisms;158
10.4;7.4 Applications;163
10.4.1;7.4.1 Direct Writing;164
10.4.2;7.4.2 Laser LIGA;164
10.4.3;7.4.3 Laser Etching;165
10.4.4;7.4.4 Pulsed Laser Deposition;166
10.4.5;7.4.5 Matrix-Assisted Pulsed Laser Evaporation (MAPLE);172
10.4.6;7.4.6 Laser-Assisted Chemical Vapor Deposition (LA-CVD);173
10.4.7;7.4.7 Lasers for MEMS (Micro-Electro-Mechanical Systems);175
10.5;7.5 Concluding Remarks;175
10.6;References;177
11;Chapter 8: Laser Micromachining;180
11.1;8.1 Basic Considerations;180
11.2;8.2 Processing Limits;180
11.3;8.3 Materials and Processes;182
11.3.1;8.3.1 Polymers;182
11.3.2;8.3.2 Glass;184
11.3.3;8.3.3 Ceramics;184
11.3.4;8.3.4 Metals;185
11.3.5;8.3.5 Layer Ablation;186
11.3.6;8.3.6 Indirect Ablation;187
11.4;8.4 Hole Drilling;189
11.5;8.5 Patterning of Thin Films;190
11.5.1;8.5.1 Dielectric Masks;190
11.5.2;8.5.2 Diffractive Optical Elements;191
11.6;8.6 Fabrication of Micro Optics and Micro Fluidics;192
11.6.1;8.6.1 Gratings;192
11.6.2;8.6.2 Micro Lenses;193
11.6.3;8.6.3 Micro Fluidics;194
11.7;8.7 Conclusions;195
11.8;References;196
12;Chapter 9: Laser Processing Architecture for Improved Material Processing;199
12.1;9.1 Laser Machining and Materials Processing;200
12.1.1;9.1.1 Introduction;200
12.1.2;9.1.2 Materials, Thermodynamic Properties, and Light/Matter Interaction;202
12.1.3;9.1.3 Photolytic Control: Conventional Approaches and Future Trends;203
12.1.4;9.1.4 Process Control;204
12.2;9.2 Laser Genotype Pulse Modulation Technique;206
12.2.1;9.2.1 Concept;206
12.2.2;9.2.2 Experimental Setup and Design;208
12.2.3;9.2.3 Performance Tests and Diagnostics;214
12.2.3.1;9.2.3.1 PSO Functionality;214
12.2.3.2;9.2.3.2 Velocity Compensation via PSO Control;218
12.2.3.3;9.2.3.3 Site-Selective Pulse Script Variation;219
12.3;9.3 Selected Applications;221
12.3.1;9.3.1 Photosensitive Glass Ceramics: A Candidate Protean Material Class;221
12.3.1.1;9.3.1.1 Modification of Optical Properties;221
12.3.1.2;9.3.1.2 Silicate Phase Fractionation;222
12.3.2;9.3.2 Nanostructured Perovskite Thin-Films;225
12.3.2.1;9.3.2.1 Conventional Laser Direct-Write Processing;226
12.3.2.2;9.3.2.2 Genotype-Inspired, Digitally Scripted Laser Direct-WriteProcessing;227
12.4;9.4 Summary and Perspective;229
12.4.1;9.4.1 Laser Genotype Process Integration;229
12.4.2;9.4.2 Pulse Script Database: A Public Domain Catalogfor Materials Processing;231
12.5;References;232
13;Index;235