Solgaard Photonic Microsystems

Micro and Nanotechnology Applied to Optical Devices and Systems
1. Auflage 2009
ISBN: 978-0-387-68351-5
Verlag: Springer US
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 632 Seiten

Reihe: MEMS Reference Shelf

This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics. The book shows how the characteristics of MEMS enable practical implementations of a variety of applications, including projection displays, fiber switches, interferometers, and spectrometers. The authors conclude with an up-to-date discussion of the need for the combination of MEMS and Photonic crystals.

Autoren/Hrsg.

Solgaard, Olav

Inhaltsverzeichnis

1;Preface;7
2;Acknowledgements;8
3;Contents;9
4;1: Introduction to Optical Microsystems;18
4.1;1.1 Scaling of Optics;18
4.2;1.2 Design of miniaturized optics;20
4.3;1.3 Roadmap;21
5;2: Electromagnetic Fields and Energy;26
5.1;2.1 Introduction to Fields and Energy;26
5.2;2.2 From Maxwell’s Equations to the Wave Equation;27
5.3;2.3 Plane Waves;30
5.4;2.4 Phasor Notation;34
5.5;2.5 The Poynting Theorem;39
5.6;2.6 Combination of Optical Fields from Separate Sources;42
5.7;2.7 Analysis Based on Energy Conservation - Examples;44
5.8;2.8 Summary of Fields and Waves;52
5.9;Further Reading;54
5.10;Exercises;54
6;3: Plane Waves at Interfaces;57
6.1;3.1 Introduction to Plane Waves;57
6.2;3.2 Plane Waves at a Dielectric Interface - Fresnel Reflections;58
6.3;3.3 Wave description of Total Internal Reflection (TIR);67
6.4;3.4 Multilayer Stacks;72
6.5;3.5 Applications of Layered Structures;75
6.6;3.6 Summary of Plane Waves;82
6.7;Further Reading;84
6.8;Exercises;84
6.9;References;90
7;4: Diffraction and Gaussian Beams;91
7.1;4.1 Introduction to Diffraction and Gaussian Beams;91
7.2;4.2 Paraxial Wave Equation;92
7.3;4.3 Gaussian Beam Transformation in Lenses;99
7.4;4.4 Resolution of a Lens;104
7.5;4.5 Projecting Gaussian Beams;110
7.6;4.6 Gaussian Beam “Imaging”;111
7.7;4.7 Truncation of Gaussian Beams;114
7.8;4.8 Summary of Gaussian Beams;122
7.9;Further Reading;125
7.10;Exercises;126
7.11;References;129
8;5: Optical Fibers and Waveguides;130
8.1;5.1 Introduction to Fibers and Waveguides;130
8.2;5.2 Geometrical optics description of waveguides;130
8.3;5.3 Three-layered Slab Waveguide;132
8.4;5.4 Optical Fibers;143
8.5;5.5 Dispersion;151
8.6;5.6 Pulse Spreading on Fibers;162
8.7;5.7 Fiber Calculation Example;173
8.8;5.8 Summary of Fibers and Waveguides;174
8.9;Exercises;180
8.10;References;186
9;6: Fiber and Waveguide Devices;187
9.1;6.1 Introduction to Fiber and Waveguide Devices;187
9.2;6.2 Coupling to Fibers and Waveguides;188
9.3;6.3. Coupled Optical Modes;202
9.4;6.4 Directional Couplers;206
9.5;6.5 Optical Devices Based on Directional Couplers;217
9.6;6.6 Periodic Waveguides – Bragg Filters;221
9.7;6.7 Waveguide Modulators;228
9.8;6.8 Summary of Fiber and Waveguide Devices;244
9.9;Exercises;245
9.10;References:;258
10;7: Optical MEMS Scanners;259
10.1;7.1 Introduction to MEMS Scanners;259
10.2;7.2 Scanner Resolution;261
10.3;7.3 Reflectivity of Metal Coated Micromirrors;278
10.4;7.4 Lens Scanners;281
10.5;7.5 Mechanical Scanner Design – One Dimensional Scanners;283
10.6;7.6 Two Dimensional Scanners;294
10.7;7.7 High Resolution 2-D Scanners – Design Examples;297
10.8;7.8 Summary of MEMS scanners;302
10.9;Exercises;304
10.10;References;306
11;8: Optical MEMS Fiber Switches;309
11.1;8.1 Introduction to MEMS Fiber Switches;309
11.2;8.2 Fiber Optical Switches and Cross Connects;310
11.3;8.3 MEMS Switch Architectures;312
11.4;8.4 2 by 2 Matrix Switch;317
11.5;8.5 N by N Matrix Switches;324
11.6;8.6 N by N Beam Steering Switches;330
11.7;8.7 Summary of MEMS Fiber Switches;340
11.8;Exercises;342
11.9;References;344
12;9: Micromirror Arrays – Amplitude and Phase Modulation;345
12.1;9.1 Introduction to Micromirror Arrays;345
12.2;9.2 Amplitude Modulating Mirror Arrays;346
12.3;9.3 Projection of Micromirror Arrays;351
12.4;9.4 Micromirrors with Phase Modulation;362
12.5;9.5 Projection of Micromirrors through Hard Apertures;369
12.6;9.6 Adaptive Optics;371
12.7;9.8 Summary of Micromirror Arrays;381
12.8;Exercises;382
12.9;References;384
13;10: Grating Light Modulators;387
13.1;10.1 Introduction to Grating Light Modulators;387
13.2;10.2 Phenomenological Description of MEMS Grating Modulators;387
13.3;10.3 Phasor Representation of Grating Modulator Operation;393
13.4;10.4 High Contrast Grating Light Modulator;399
13.5;10.5 Diffraction Gratings;402
13.6;10.6 Projection Displays Based on Grating Modulators;416
13.7;10.7 Summary of Grating Light Modulators;435
13.8;Exercises;436
13.9;References;438
14;11: Grating Light Modulators for Fiber Optics;440
14.1;11.1 Fiber Optic Modulators;440
14.2;11.2 Low Dispersion Grating Light Modulators;442
14.3;11.3 Polarization Independent Grating Light Modulators;452
14.4;11.4 Summary of GLMS for Fiber Optics;456
14.5;Further Reading;456
14.6;Exercises;457
14.7;References;458
15;12. Optical Displacement Sensors;459
15.1;12.1 Introduction to Optical Displacement Sensors;459
15.2;12.2 Interferometers as Displacement Sensors;462
15.3;12.3 Optical Lever;480
15.4;12.4 Sources of Noise in Displacement Measurements;484
15.5;12.5 Signal-to-Noise Ratio;487
15.6;12.6 Detection Limits in Displacement Measurements;490
15.7;12.7 Summary of Optical Displacement Sensors;497
15.8;Exercises;498
15.9;References;500
16;13: Micro-Optical Filters;501
16.1;13.1 Introduction to Micro-Optical Filters;501
16.2;13.2 Amplitude Filters;502
16.3;13.3 Dispersion Compensators;509
16.4;13.4 MEMS Spectrometers;511
16.5;13.5 Diffractive Spectrometers;522
16.6;13.6 Tunable Lasers;528
16.7;13.7 Summary of Microoptical Filters;534
16.8;Exercises;535
16.9;References;538
17;14: Photonic Crystal Fundamentals;543
17.1;14.1 Introduction to Photonic Crystals;543
17.2;14.2 Photonic Crystal Basics;544
17.3;14.3 Guided Resonances;554
17.4;14.4 Comparison of Photonic and Electronic Crystals;564
17.5;14.5 Summary of PC Fundamentals;566
17.6;Exercises;567
17.7;References;568
18;15: Photonic Crystal Devices and Systems;571
18.1;15.1 Introduction to PC Devices and Systems;571
18.2;15.2 IC Compatible Photonic Crystals;572
18.3;15.3 Photonic Crystal Optical Components;578
18.4;15.4 Tunable Photonic Crystals;584
18.5;15.5 Photonic Crystal Fiber Sensors;590
18.6;15.6 Summary of PC Devices and Systems;592
18.7;Exercises;593
18.8;References;594
19;Appendix A: Geometrical Optics;599
20;Appendix B: Electrostatic Actuation;607
21;Index;636