Buch, Englisch, 230 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 574 g
Reihe: Microtechnology and MEMS
Buch, Englisch, 230 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 574 g
Reihe: Microtechnology and MEMS
ISBN: 978-3-540-23782-2
Verlag: Springer Berlin Heidelberg
This book provides a comprehensive treatment of the very interdisciplinary ?eld of CMOS technology-based chemical microsensor systems. It is, on the one hand, targeted at scientists and engineers interested in getting ?rst - sights in the ?eld of chemical sensing since all necessary fundamental kno- edgeisincluded.Ontheotherhand,italsoaddressesexpertsinthe?eldsince it provides detailed information on all important issues related to realizing chemicalmicrosensorsand,speci?cally,chemicalmicrosensorsinCMOSte- nology. A large number of sensor and integrated-sensor-system implemen- tionsillustratethecurrentstateoftheartandhelptoidentifythepossibilities for future developments. Since microsensors produce “microsignals”, sensor miniaturization without sensor integration is in many cases prone to failure. This book will help to reveal the bene?ts of using integrated electronics and CMOS-technology for developing chemical microsensor systems and, in p- ticular, the advantages that result from realizing monolithically integrated sensor systems comprising transducers and associated circuitry on a single chip. After a brief introduction, the fundamentals of chemical sensing are laid out,includingashortexcursionintotherelatedthermodynamicsandkinetics. Fabrication and processing steps that are commonly used in semiconductor industry are then abstracted. These more fundamental sections are followed by a short description of microfabrication techniques and the CMOS s- strateandmaterials.Thereafter,acomprehensiveoverviewofsemiconduct- based and CMOS-based transducer structures for chemical sensors is given.
Zielgruppe
Research
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Produktionstechnik Fertigungstechnik
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Sensorik
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien
- Technische Wissenschaften Technik Allgemein Nanotechnologie
- Naturwissenschaften Physik Quantenphysik
- Interdisziplinäres Wissenschaften Wissenschaften: Forschung und Information Forschungsmethodik, Wissenschaftliche Ausstattung
- Naturwissenschaften Physik Physik Allgemein Experimentalphysik
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise
- Naturwissenschaften Chemie Analytische Chemie
- Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Technologie der Oberflächenbeschichtung
- Naturwissenschaften Physik Physik Allgemein Theoretische Physik, Mathematische Physik, Computerphysik
- Naturwissenschaften Physik Physik Allgemein Geschichte der Physik
Weitere Infos & Material
Fundamentals of Chemical Sensing.- Microtechnology for Chemical Sensors.- Microfabricated Chemical Sensors.- CMOS Platform Technology for Chemical Sensors.- Outlook and Future Developments.
