Jackson Micro and Nanomanufacturing

1. Auflage 2007
ISBN: 978-0-387-26132-4
Verlag: Springer US
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 702 Seiten

This, the corrected second printing of Jackson's authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.

Doctor Mark James Jackson is an Associate Professor of Mechanical Engineering Technology at Purdue University and was a Visiting Fellow at the University of Liverpool, U.K. Doctor Jackson is active in research work concerned with understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining. He is also involved in developing next generation manufacturing processes and biomedical engineering. Doctor Jackson has directed, co-directed, and managed research grants funded by the Engineering and Physical Sciences Research Council, The Royal Society of London, The Royal Academy of Engineering, European Union, Ministry of Defence, Atomic Weapons Establishment, National Science Foundation, N.A.S.A. and U. S. Department of Energy. Doctor Jackson is Vice President and Chief Technology Officer of Vitrified Technologies, Inc., which is established to develop next generation nano and micro machine tools and cutting tools for nanotechnology applications. Dr. Jackson is strongly committed to working closely with manufacturing industry and has served on political committees to ensure that manufacturing counts.    

Autoren/Hrsg.

Jackson, Mark J.

Inhaltsverzeichnis

1;Contents;5
2;Preface;9
3;1. Principles of Micro- and Nanofabrication;11
3.1;1.1 Introduction;11
3.2;1.2 Material Removal Rates;57
3.3;1.3 Conclusions;61
3.4;1.4 Problems;61
3.5;References;62
4;2. Microfabrication Using X- ray Lithography;65
4.1;2.1 Introduction;65
4.2;2.2 X- ray Lithography;68
4.3;2.3 Synchrotron Radiation (SR);69
4.4;2.4 Microfabrication Process;72
4.5;2.5 Methods of Resist Application;93
4.6;2.6. Exposure;95
4.7;2.7 Problems;105
4.8;References;106
5;3. Manufacturing High Aspect Ratio Microstructures;109
5.1;3.1 Introduction;109
5.2;3.2 Dry Etching;109
5.3;3.3 Plasma Etching Processes;110
5.4;3.4 Characteristics Of The Plasma;112
5.5;3.5 Etching of Microstructures;113
5.6;3.6 Micromachining High Aspect Ratio Microstructures;130
5.7;3.7 Micromolding;130
5.8;3.8 Micromolding Processes;131
5.9;3.9 Micromolding Tools;138
5.10;3.10 Micromold Design;141
5.11;3.11 Micromolding Applications;141
5.12;3.12 Limitations of Micromolding;142
5.13;3.13 Fabrication of Moving Microstructures;142
5.14;3.14 Conclusions;148
5.15;3.15 Problems;148
5.16;References;149
6;4. Meso-Micromachining;153
6.1;4.1 Introduction;153
6.2;4.2 Size Effects in Machining Processes;154
6.3;4.3 Mechanism for Large Plastic Flow;187
6.4;4.4 Inhomogeneous Microstrains;188
6.5;4.5 Origins of the Size Effect;190
6.6;4.6 Meso-Micromachining Processes;192
6.7;4.7 Problems;198
6.8;References;198
7;5. Mechanical Micromachining;201
7.1;5.1 Introduction;201
7.2;5.2 Microfluidic Systems;201
7.3;5.3 Theory of Micromachining;205
7.4;5.4 Experimental Micromachining ;218
7.5;5.5 Micromachining Tool Design;231
7.6;5.6 High Speed Air Turbine Spindles;236
7.7;5.7 Mechanical Design of High-Speed Rotors;243
7.8;5.8 Discussion;260
7.9;5.9 Conclusions;261
7.10;5.10 Future Developments;262
7.11;5.11 Problems;263
7.12;References;263
8;6. Microgrinding;265
8.1;6.1 Introduction;265
8.2;6.2 Grinding Wheels;271
8.3;6.3 Conventional Grinding Processes;285
8.4;6.4 Precision Grinding Processes;289
8.5;6.5 Ultraprecision Grinding ;309
8.6;6.6 Conclusions;324
8.7;6.7 Problems;325
8.8;References;325
9;7. Diamond Microcutting Tools ;332
9.1;7.1 Introduction;332
9.2;7.2 Properties of Diamond;334
9.3;7.3 History of Diamond;335
9.4;7.4 CVD Diamond Technology;341
9.5;7.5 CVD Diamond Processes;342
9.6;7.6 Treatment of Substrate;346
9.7;7.7 Modification of HFCVD Process;352
9.8;7.8 Nucleation and Growth;354
9.9;7.9 Deposition on Three- Dimensional Substrates;365
9.10;7.10 Wear of Diamond;373
9.11;7.11 Time-Modulated CVD Diamond;381
9.12;7.12 Conclusions;390
9.13;7.13 Problems;391
9.14;References;391
10;8. Laser Micro- and Nanofabrication;396
10.1;8.1 Introduction;396
10.2;8.2 Laser Fundamentals;396
10.3;8.3 Laser Microfabrication ;413
10.4;8.4 Laser Nanofabrication;473
10.5;8.5 Conclusions;481
10.6;8.6 Problems;482
10.7;References;482
11;9. Micromachining Using Pulsed Water Droplets;484
11.1;9.1 Introduction;484
11.2;9.2 Theory of Pulsed Liquid Impact;485
11.3;9.3 Impact by Water Drops;489
11.4;9.4 Modeling Machining Thresliolds;491
11.5;9.5 Comparative Results;502
11.6;9.6 Material Removal Rates;506
11.7;9.7 Design of Water-Based Machine Tools;508
11.8;9.8 Analysis of Space Frame;509
11.9;9.9 Mode Shapes of Tetrahedral Structures;513
11.10;9.10 Conclusions;525
11.11;9.11 Problems;527
11.12;References;527
12;10. Diamond Nanogrinding;529
12.1;10.1 Introduction;529
12.2;10.2 Piezoelectric Nanogrinding;530
12.3;10.3 Stress Analysis in a Nanogrinding Grain ;532
12.4;10.4 Fracture Dominated Wear Model;542
12.5;10.5 Nanogrinding;543
12.6;10.6 Porous Nanogrinding Tools;553
12.7;10.7 Laser Dressing of Nanogrinding Tools;577
12.8;10.8 Future Directions;595
12.9;10.9 Problems;596
12.10;References;597
13;11. Nanomachining;599
13.1;11.1 Introduction;599
13.2;11.2 Nanometric Machining;600
13.3;11.3 Theoretical Basis of Nanomachining;603
13.4;11.4 Implementation of Nanomachining;620
13.5;11.5 Conclusions;638
13.6;11.6 Problems;639
13.7;References;640
14;12. Micro- and Nanomanufacturing;643
14.1;12.1 Introduction;643
14.2;12.2 Micromanufacturing ;643
14.3;12.3 Nanomanufacturing;656
14.4;12.4 Commercialization Issues of Micro- and Nanotechnologies;680
14.5;12.5 Future Developments;691
14.6;12.6 Problems;692
14.7;References;692
15;Subject Index;694