Buch, Englisch, 246 Seiten, Paperback, Format (B × H): 148 mm x 210 mm, Gewicht: 362 g
Buch, Englisch, 246 Seiten, Paperback, Format (B × H): 148 mm x 210 mm, Gewicht: 362 g
Reihe: Solare Energie- und Systemforschung
ISBN: 978-3-8396-1074-9
Verlag: Fraunhofer Verlag
In this thesis, the suitability of ion implantation for the fabrication of modern solar cells was investigated. The implantation of mass-separated boron or phosphorus ions and subsequent furnace annealing was used to study the charge carrier recombination due to implantation defects and obtain doping profiles for an evaluation at the device level. Furthermore, novel process sequences combining ion implantation and furnace diffusion for the simplified doping of back-junction back-contact cells were developed and evaluated with respect to the influence of a reverse breakdown and a weak front-side doping on the solar cell performance.