Bäuerle Laser Processing and Chemistry

2. Auflage 1996
ISBN: 978-3-662-03253-4
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 649 Seiten, eBook

Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser--matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas--solid, liquid--solid, and solid--solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. Students, engineers, and manufacturers alike will find this book an invaluable reference work for the state of the art in laser processing.

Zielgruppe

Research

Autoren/Hrsg.

Bäuerle, Dieter

Inhaltsverzeichnis

I: Overview and Fundamentals.- 1 Introduction.- 2 Thermal, Photophysical, and Photochemical Processes.- 3 Reaction Kinetics and Transport of Species.- 4 Nucleation and Cluster Formation.- 5 Lasers, Experimental Aspects, Spatial Confinement.- II: Temperature Distributions and Surface Melting.- 6 General Solutions of the Heat Equation.- 7 Semi-infinite Substrates.- 8 Infinite Slabs.- 9 Non-uniform Media.- 10 Surface Melting.- III: Material Removal.- 11 Vaporization, Plasma Formation.- 12 Pulsed-Laser Ablation.- 13 Modelling of Pulsed-Laser Ablation.- 14 Etching of Metals and Insulators.- 15 Etching of Semiconductors.- IV: Material Deposition.- 16 Laser-CVD of Microstructures.- 17 Growth of Fibers.- 18 Direct Writing.- 19 Thin-Film Formation by Laser-CVD.- 20 Adsorbed Layers, Laser-MBE.- 21 Liquid-Phase Deposition, Electroplating.- 22 Thin-Film Formation by Pulsed-Laser Deposition and Laser-Induced Evaporation.- V: Surface Transformations, Synthesis and Structure Formation.- 23 Structural Transformations.- 24 Doping.- 25 Cladding, Alloying, and Synthesis.- 26 Oxidation, Nitridation.- 27 Depletion and Exchange of Species.- 28 Instabilities and Structure Formation.- VI: Measurement Techniques, Diagnostics.- 29 Measurement Techniques.- 30 Analysis of Species, Plasmas, and Surfaces.- Appendix A: Definitions and Formulas.- A.1: Symbols and Conversion Factors.- A.2: Abbreviations, Acronyms.- A.3: Mathematical Functions and Relations.- A.4: The Density of Dissociated Species.- A.5: The F-Function.- Appendix B: Tabular Presentation of the Materials Investigated.- B.1: Ablation of Inorganic Materials.- B.2: Ablation of Organic Polymers and Biological Materials.- B.3: Materials Etching.- B.4: LCVD of Microstructures.- B.5: Thin-Film Formation by LCVD.- B.6: Deposition from AdsorbedLayers, Laser-MBE, Laser-ALE.- B.7: Deposition from Liquids.- B.8: Formation of Thin Films and Heterostructures by PLD.- B.9: Surface Oxidation and Nitridation.- B.10: Surface Modifications, Transformation of Solid Films.- Tables.- References.