Bhattacharyya Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology

1. Auflage 2015
ISBN: 978-0-323-35288-8
Verlag: Elsevier Science & Techn.
Format: EPUB
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 296 Seiten

Reihe: Micro and Nano Technologies

Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM. - Covers the generation of micro features used for advanced engineering of materials for fabrication of MEMS, microsystems and other micro-engineering applications - Explores the trend of decreasing size of fabricated devices, reflected in coverage of generation of high-precision nano-features on metal and semiconductors utilizing SPM, STM, and AFM, and nanotechnology aspects of EMM - Describes nanofabrication utilizing anodic dissolutions for mass manufacturing by overcoming obstacles utilizing electrochemical microsystem technology (EMST) and electrochemical nanotechnology (ENT)

Professor, Production Engineering Department, Jadavpur University, Kolkata, IndiaField of Specialization: Non-Traditional Machining Processes, Micro Machining.Advanced Manufacturing Technology (AMT), Production Management.Principal Investigator since 1995 for seven multi-year research projects e.g. on Electrochemical Machining (ECM), Electrochemical Discharge Machining (ECDM), and Electrochemical Micromachining (EMM)Professor, Production Engineering Department, since 2000Head of the Department, Production Engineering Department, from 2001 to 2003Coordinator of Quality Improvement Program (QIP), Jadavpur University, since 2002Coordinator of Center of Advanced Study (CAS) Phase II-IV Programs consisting thrust areas: Micromachining and Nanotechnology, Micromanufacturing, sponsored by UGC, since 2003Achieved several Certificates of Merit and Certificates of Achievement Institution Award & Gold Medal by The Institution of Engineers (India) for a research paper Keynote speaker, chair person, presenter and organizer/coordinator of several international conferences.Visited several countries such as England, Dublin, Taiwan, Hongkong, Thailand etc. for research and academic purposes.Board member and Fellow of several academic bodies in several institutionsGuest editor of International journals and editor of conference proceedingsSupervised several Ph.D thesis and filed several patents in his credit.Authored and co-authored around 353+ articlesAuthor of 83 articles with 1352 total citations by 959 documents as listed in ScopusH-Index of 24 per SCOPUS

Autoren/Hrsg.

Bhattacharyya, Bijoy

Leseproben

Symbols

m=Mass of a substance altered at an electrode

Q=Total electric charge passed

F=Faraday constant

M=Molar mass of a substance

z=Valency

I=Current

t=Time

n=Number of moles

ne=Number of electrons

A=Area; Atomic weight (Chapter 1); Aspect ratio (Chapter 13)

i'=Current density

i=Partial current; number of machining parameters (Chapter 8)

E=Electrode potential

Eeq=Equilibrium electrode potential

Ei=Electrode potential at current i

E0=Electrode potential at zero current

?E=Electrode polarization

E0'=Formal potential which is the adjusted form of standard potential

v=Reaction rate

vrxn=Net rate of the electrode reaction

H=Heat generated

R=Electrical resistance

V=Voltage

C=Concentration

d0=Nernst diffusion layer thickness

vmt=Rate of mass transfer

m0=Mass transfer coefficient of species O

0* =Bulk concentration of species O

D0=Diffusion coefficient at x=0

CO=Concentration of species O

CR=Concentration of species R

R*=Bulk concentration of species R

mR=Mass transfer coefficient of species R

T=Temperature in Kelvin

R'=Universal gas constant

Rct=Charge transfer resistance

?=Over potential

?ac=Activation overpotential

ji=Partial current density

j=Total current density

?=Actual observed mass removal

?'=Power conversion efficiency

Uoc=Open-circuit potential

Jsc=Short-circuit current density

FF=Fill factor

E0=Irradiance

t=Charging time constant

Cd=Resistance of double layer

?=Radial frequency

Cd=Double-layer capacitance

RW=Warburg Impedance

s=Warburg coefficient

Rct=Charge transfer resistance

i0=Exchange current density

Tb=Boiling temperature

T0=Temperature at the inlet

U0=Velocity at the inlet

ea=Electrochemical equivalent of anode

ce=Specific heat of electrolyte

h0=Equilibrium gap width at gap inlet

?a=Anode metal density

?0=Density at gap inlet

f'=Feed rate of the tool

?s=Specific resistance or resistivity of electrolyte

h=Inter-electrode gap

Qv=Volume of material removed

K=Electrochemical constant for a particular material

?c=Efficiency of dissolution or current efficiency

Qact=Actual weight loss or actual material removed

Qth=Theoretical weight loss or theoretical material removed

J=Anodic limiting current density

D=Effective diffusion coefficient

Csat=Surface concentration

Jmt=Current density due to migration and diffusion

D'=Diffusivity

V/?X=Potential gradient

C/?X=Concentration gradient

q=Charge stored in the capacitor

C', C (Chapter 3)=Capacitance

Ri=Inter-electrode gap resistance

Re=Electrolyte resistance

ic=Charging current

Rshort=Resistance across small flow path between the front end of the tool and workpiece surface i.e., IEG

Rlong=Resistance across long flow path between longitudinal surface of the tool and workpiece along the side of tool

RP=Polarization resistance

?'a=Over potential at anode

?'c=Over potential at cathode

jmt=Current density due to mass transfer

jet=Current density due to electron transfer

Ceq=Equivalent capacitance

V0=On-time voltage

a=Charge transfer coefficient

M'=Molecular mass

Von-time=Volume of material removed per pulse

ton=Pulse on time

t*=Time required for charging of double layer

V*=Flat shape waveform voltage

f=Pulse frequency in...