Microelectronic Test Structures for CMOS Technology

2011
ISBN: 978-1-4899-9055-6
Verlag: Springer

Buch, Englisch, 373 Seiten, Previously published in hardcover, Format (B × H): 155 mm x 235 mm, Gewicht: 616 g

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased cost and complexity of development and manufacturing. In this timely volume, IBM scientists Manjul Bhushan and Mark Ketchen emphasize high speed characterization techniques for digital CMOS circuit applications and bridging between circuit performance and characteristics of MOSFETs and other circuit elements.  Detailed examples are presented throughout, many of which are equally applicable to other microelectronic technologies as well. The authors’ overarching goal is to provide students and technology practitioners alike a practical guide to the disciplined design and use of test structures that give unambiguous information on the parametrics and performance of digital CMOS technology.

Zielgruppe

Professional/practitioner

Autoren/Hrsg.

Ketchen, Mark B.

Bhushan, Manjul

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Halb- und Supraleitertechnologie
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise

Inhaltsverzeichnis

Introduction.- Test Structure Basics.- Resistors.- Capacitors.- MOSFETs.- Ring Oscillators.- High Speed Characterization.- Test Structures of SOI Technology.- Test Equipment and Measurements.- Data Analysis.