Kim / Dugger / Mittal Adhesion Aspects in MEMS/NEMS

Erscheinungsjahr 2012
ISBN: 978-90-04-19095-5
Verlag: Taylor & Francis
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 420 Seiten

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects owing to their small size and limited actuation force that can be generated. Extension of MEMS technology concepts to the nanoscale and development of NanoElectroMechanicalSystems(NEMS) will result in systems even more strongly influenced by surface forces.
The book is divided into five parts as follows: Part 1: Understanding Through Continuum Theory; Part 2: Computer Simulation of Interfaces; Part 3: Adhesion and Friction Measurements; Part 4: Adhesion in Practical Applications; and
Part 5: Adhesion Mitigation Strategies.
This compilation constitutes the first book on this extremely important topic in the burgeoning field of MEMS/NEMS. It is obvious from the topics covered in this book that bountiful information is contained here covering understanding of surface forces and adhesion as well as novel ways to mitigate adhesion in MEMS/NEMS.
This book should be of great interest to anyone engaged in the wonderful and fascinating field of MEMS/NEMS, as it captures the current R&D activity.

Autoren/Hrsg.

Kim, Seong H.

Dugger, Michael T.

Mittal, Kash L.

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik
• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Technologie der Oberflächenbeschichtung
• Technische Wissenschaften Technik Allgemein Nanotechnologie
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme

Inhaltsverzeichnis

Preface
Part 1: Understanding Through Continuum Theory
Numerical Analysis of Contact Mechanics between a Spherical Slider and a Flat Disk with Low Roughness Considering Lennard–Jones Surface Forces
K. Ono
Equilibrium Vapor Adsorption and Capillary Force: Exact Laplace–Young Equation Solution and Circular Approximation Approaches
D. B. Asay, M. P. de Boer and S. H. Kim
Which Fractal Parameter Contributes Most to Adhesion?
D.-L. Liu, J. Martin and N. A. Burnham
Effects of Contacting Surfaces on MEMS Device Reliability
Y. Du, W. A. de Groot, L. Kogut, Y. J. Tung and E. P. Gusev
A van der Waals Force-Based Adhesion Model for Micromanipulation
S. Alvo, P. Lambert, M. Gauthier and S. Régnier
Part 2: Computer Simulation of Interfaces
Lattice Gas Monte Carlo Simulation of Capillary Forces in Atomic Force Microscopy
J. Jang and G. C. Schatz
Large Scale Molecular Dynamics Simulations of Vapor Phase Lubrication for MEMS
C. D. Lorenz, M. Chandross and G. S. Grest
Atomistic Factors Governing Adhesion between Diamond, Amorphous Carbon and Model Diamond Nanocomposite Surfaces
P. L. Piotrowski, R. J. Cannara, G. Gao, J. J. Urban, R. W. Carpick and J. A. Harrison
Part 3: Adhesion and Friction Measurements
Theoretical and Experimental Study of the Influence of AFM Tip Geometry and Orientation on Capillary Force
A. Chau, S. Régnier, A. Delchambre and P. Lambert
Odd–Even Effects in the Friction of Self-Assembled Monolayers of Phenyl-Terminated Alkanethiols in Contacts of Different Adhesion Strengths
Y. Yang, A. C. Jamison, D. Barriet, T. R. Lee and M. Ruths
The Pull-Off Force and the Work of Adhesion: New Challenges at the Nanoscale
N. W. Moore and J. E. Houston
Interfacial Adhesion between Rough Surfaces of Polycrystalline Siliconand Its Implications for M/NEMS Technology
I. Laboriante, B. Bush, D. Lee, F. Liu, T.-J. K. Liu, C. Carraro and R. Maboudian
Effect of Air–Plasma Pre-treatment of Si Substrate on Adhesion Strength and Tribological Properties of a UHMWPE Film
M. Abdul Samad, N. Satyanarayana and S. K. Sinha
Part 4: Adhesion in Practical Applications
A Review of Adhesion in an Ohmic Microswitch
G. G. Adams and N. E. McGruer
Characterization of Gold–Gold Microcontact Behavior Using a Nanoindenter Based Setup
K. W. Gilbert, S. Mall and K. D. Leedy
Characterization and Adhesion of Interacting Surfaces in Capacitive RF MEMS Switches Undergoing Cycling
S. M. Yeo, A. A. Polycarpou, S. I. Tseregounis, N. Tavassolian and J. Papapolymerou
Molecular Mobility and Interfacial Dynamics in Organic Nano-electromechanical Systems (NEMS)
S. E. Sills and R. M. Overney
Part 5: Adhesion Mitigation Strategies
Microscale Friction Reduction by Normal Force Modulation in MEMS
W. M. van Spengen, G. H. C. J. Wijts, V. Turq and J. W. M. Frenken
Microchannel Induced Surface Bulging of a Soft Elastomeric Layer
A. Majumder, A. K. Tiwari, K. Korada and A. Ghatak
Fabrication of Novel Superhydrophobic Surfaces and Water Droplet Bouncing Behavior —Part 1: Stable ZnO–PDMS Superhydrophobic Surface with Low Hysteresis Constructed Using ZnO Nanoparticles
B.-B. Wang, J.-T. Feng, Y.-P. Zhao and T. X. Yu
Plasma Modification of Polymer Surfaces and Their Utility in Building Biomedical Microdevices
S. Bhattacharya, R. Kr. Singh, S. Mandal, A. Ghosh, S. Bok, V. Korampally, K. Gangopadhyay and S. Gangopadhyay