Buch, Englisch, 150 Seiten, Format (B × H): 210 mm x 279 mm, Gewicht: 417 g
ISBN: 978-3-540-20410-7
Verlag: Springer Berlin Heidelberg
Introduction. 1 Early Vacuum Science and Technology. 2 Early Electricity and Magnetism. 5 Early Plasma Physics and Chemistry. 7 Some Scientific and Engineering Societies and Publications. 9 Patents and the U. S. Patent Office. 10 Deposition Processes. 11 Sputter Deposition. 11 Thermal Evaporation. 19 Arc Vapor Deposition. 24 Chemical Vapor Deposition. 27 Ion Plating. 30 Surface Preparation. 34 Summary. 37 Endnotes. 39 References. 43 Acronyms Used in Vacuum Coating. 61 Glossary of Terms for Vacuum Coating. 69 The Foundations of Vacuum Coating Technology Introduction Vacuum coatings processes use a vacuum (sub are combined in the same chamber at the same time to deposit thematerial in a "hybrid process. " For atmospheric pressure) environment and an atomic example, the deposition of titanium carbonitride or molecular condensable vapor source to deposit thin films and coatings. The vacuum environment is (TiCxNy or Ti(CN)) may be performed using a hy used not only to reduce gas particle density but also brid process where the titanium may come from sput to limit gaseous contamination, establish partial pres tering titanium; the nitrogen is from a gas and the sures of inert and reactive gases, and control gas flow. carbon is from acetylene vapor. Alloys, mixtures, The vapor source may be from a solid or liquid sur compounds and composite materials can be depos face (physical vapor deposition-PVD), or from a ited using a single source of the desired material or chemical vapor precursor (chemical vapor deposi multiple sources of the constituents.
Zielgruppe
Research
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Mechanische und Thermische Verfahrenstechnik
- Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Technologie der Oberflächenbeschichtung
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Produktionstechnik Fertigungstechnik
Weitere Infos & Material
Early Vacuum Science and Technology.- Early Electricity and Magnetism.- Early Plasma Physics and Chemistry.- Some Scientific and Engineering Societies and Publications.- Patents and the U.S. Patent Office.- Deposition Processes.- Surface Preparation.- Summary.- Endnotes.- References.- Acronyms Used in Vacuum Coating.- Glossary of Terms for Vacuum Coating.
