MEMS: A Practical Guide of Design, Analysis, and Applications

Softcover Nachdruck of the original 1. Auflage 2006
ISBN: 978-3-662-56835-4
Verlag: Springer

Buch, Englisch, 965 Seiten, Previously published in hardcover, Format (B × H): 155 mm x 235 mm, Gewicht: 1469 g

The void created by a lack of industry standards has been filled with the arrival of this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Earlier MEMS books have comprehensively covered fabrication techniques, but this book’s eighteen chapters written by leading experts from across the world cover a broad range of topics from transducer operations to interface circuitry, microacutators and microchanining. Issues addressed include alternative designs, reliability and cost effectiveness in the context of appropriate applications. The book satisfies a demand for literature on analysis and design of microsystems and will interest engineering and research scientists in industry and academia.

Zielgruppe

Research

Autoren/Hrsg.

Paul, Oliver

Korvink, Jan

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik
• Technische Wissenschaften Technik Allgemein Nanotechnologie

Inhaltsverzeichnis

Microtransducer Operation.- Material Properties: Measurement and Data.- MEMS and NEMS Simulation.- System-Level Simulation of Microsystems.- Thermal-Based Microsensors.- Photon Detectors.- Free-Space Optical MEMS.- Integrated Micro-Optics.- Microsensors for Magnetic Fields.- Mechanical Microsensors.- Semiconductor-Based Chemical Microsensors.- Microfluidics.- Biomedical Systems.- Microactuators.- Micromachining Technology.- LIGA Technology for R&D and Industrial Applications.- 17 Interface Circuitry and Microsystems.