Vedam Optical Characterization of Real Surfaces and Films

Advances in Research and Development
1. Auflage 2013
ISBN: 978-1-4832-8893-2
Verlag: Elsevier Science & Techn.
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, Band Volume 19, 328 Seiten, Web PDF

Reihe: Physics of Thin Films

This new volume of the highly respected Physics of Thin Films Serial discusses inhomogeneity in real films and surfaces. The volume, guest-edited by K. Vedam, follows the growth of thin films both from the surface of the substrate, and from the atomic level, layer by layer. The text features coverage of Real-Time Spectroscopic Ellipsometry (RTSE) and Reflectance Anisotropy (RA), two major breakthrough optical techniques used to characterize real time and insitu films and surfaces. In six insightful chapters, the contributors assess the impact of these techniques, their strengths and limitations, and their potential for further development.

Autoren/Hrsg.

Vedam, K.

Inhaltsverzeichnis

1;Front Cover
;1
2;Physics of Thin Films: Optical Characterization of Real Surfaces and Films;4
3;Copyright Page
;5
4;Table of Contents;6
5;Contributors;10
6;Preface;12
7;Chapter 1. In Situ Studies of Crystalline Semiconductor Surfaces by Reflectance Anisotropy;18
7.1;I. Introduction;19
7.2;II. The Reflectance Anisotropy Technique;20
7.3;III. Applications of RA to the Growth of III–V Semiconductors;28
7.4;IV. Growth of Lattice-Mismatched III–V and II–VI Structures;55
7.5;V. Summary and Conclusions;60
7.6;References;62
8;Chapter 2. Real-Time Spectroscopic Ellipsometry Studies of the Nucleation, Growth, and Optical Functions of Thin Films, Part I: Tetrahedrally Bonded Materials;66
8.1;I. Introduction;67
8.2;II. Techniques of Real-Time Spectroscopic Ellipsometry;71
8.3;III. Studies of Tetrahedrally Bonded Thin Films;78
8.4;IV. Summary;133
8.5;Acknowledgments;138
8.6;References;139
9;Chapter 3. Real-Time Spectroscopic Ellipsometry Studies of the Nucleation, Growth, and Optical Functions of Thin Films, Part II: Aluminum;144
9.1;I. Introduction;144
9.2;II. Theoretical Background;147
9.3;III. Experimental Apparatus for Real-Time Monitoring;164
9.4;IV. Results and Discussion;166
9.5;V. Summary;200
9.6;Acknowledgments;204
9.7;References;204
10;Chapter 4. Optical Characterization of Inhomogeneous Transparent Films on Transparent Substrates by Spectroscopic Ellipsometry;208
10.1;I. Introduction;208
10.2;II. Inhomogeneity in Thin Films;210
10.3;III. Experimental;213
10.4;IV. Experimental Results on Transparent Films;232
10.5;V. Discussion;248
10.6;VI. Summary and Conclusion;260
10.7;References;261
11;Chapter 5. Characterization of Ferroelectric Films by Spectroscopic Ellipsometry;266
11.1;I. Introduction;266
11.2;II. Description of the SE System;271
11.3;III. Experimental Procedure;273
11.4;IV. Results and Discussion;275
11.5;V. Relation between Film Microstructure and Electrical Properties;289
11.6;VI. Conclusions;292
11.7;Acknowledgments;293
11.8;References;293
12;Chapter 6. Effects of Optical Anisotropy on Spectro-ellipsometric Data for Thin Films and Surfaces;296
12.1;I. Introduction;296
12.2;II. The Generalized Approach;300
12.3;III. Comparison with Available Data and Previous Methods;308
12.4;IV. Simulations of Anisotropic Effects;312
12.5;Acknowledgment;329
12.6;References;330
13;Author Index;332
14;Subject Index;340