Buch, Englisch, 304 Seiten, Format (B × H): 171 mm x 246 mm, Gewicht: 646 g
Buch, Englisch, 304 Seiten, Format (B × H): 171 mm x 246 mm, Gewicht: 646 g
ISBN: 978-3-527-33501-5
Verlag: Wiley VCH Verlag GmbH
Fachgebiete
Weitere Infos & Material
PREFACEEVALUATION OF MECHANICAL PROPERTIES OF MEMS MATERIALS AND THEIR STANDARDIZATIONELASTOPLASTIC INDENTATION CONTACT MECHANICS OF HOMOGENEOUS MATERIALS AND COATING?SUBSTRATE SYSTEMSTHIN-FILM CHARACTERIZATION USING THE BULGE TESTUNIAXIAL TENSILE TEST FOR MEMS MATERIALSON-CHIP TESTING OF MEMSRELIABILITY OF A CAPACITIVE PRESSURE SENSORINERTIAL SENSORSINERTIAL SENSORSRELIABILITY OF MEMS VARIABLE OPTICAL ATTENUATORECO SCAN MEMS RESONANT MIRRORINDEX
Evaluation of Mechanical Properties of MEMS Materials and Their StandardizationElastoplastic Indentation Contact Mechanics of Homogeneous Materials and Coating-Substrate SystemsThin film Characterization Using the Bulge TestUniaxial Tensile Test for MEMS MaterialsOn-chip Testing of MEMSReliability of a Capacitive Pressure SensorInertial SensorsHigh-Accuracy, High-Reliability MEMS Accelerometer Reliability of MEMS Variable Optical AttenuatorReliability of MEMS Variable Optical Attenuator (pages 239-266)Eco Scan MEMS Resonant Mirror